Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: E (Out 1: PNP, Out 2: Analog 1 to 5 V), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Bracket: R (w/Bracket)

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Out Specification: E (Out 1: PNP, Out 2: Analog 1 to 5 V), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Bracket: R (w/Bracket)

Series: 25A-PF3W5, Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min

VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Function: 2 (2 Position Double), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Body Ported M5X0.8), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket), CE-Compliant: Q (CE-Compliant)

Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: M5 (Body Ported M5X0.8), Thread: Rc, Bracket: F (Bracket), CE-Compliant: Q (CE-Compliant)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: M (Round Type Pressure Gauge w/Color Zone), Attachment: TV (T + V), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 6 (12VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: R (External Pilot), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)