Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Rubber Bumper, Bore Size: 40mm, Thread: None, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: None, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 32mm, Thread: None, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: None, Mounting: Axial Foot, Style: Non-lube Rubber Bumper, Bore Size: 25mm, Thread: None, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Rubber Bumper, Bore Size: 20mm, Thread: TN, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: None, Mounting: Front Flange, Style: Non-lube Air Cushion, Bore Size: 20mm, Thread: None, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Front Trunnion, Style: Non-lube Rubber Bumper, Bore Size: 25mm, Thread: None, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 32mm, Thread: TN, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Double Clevis, Style: Non-lube Air Cushion, Bore Size: 32mm, Thread: TN, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Front Flange, Style: Non-lube Rubber Bumper, Bore Size: 32mm, Thread: TN, Stroke: 50mm, Option: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

•

Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

Large Flow Air Filter AF800/900 Series

Refer to back page 50 for Safety Instructions and pages 387 to 391 for F.R.L. Precautions. 662

AIR CYLINDER

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

Dual Speed Controller with One-touch Fitting Series ASD 1

3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

ASD

3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

Air preparation filter

E) Remove the used element and O-ring from the bowl. In this operation, remove the support ring to make the replacement easier. D) E) Point O-ring for bowl Support ring Rotate approxim ately 10. Replacement should be performed while the bowl is held upright as the O-ring easily falls off. -18- Doc. no. AMX-OMU0058-C F) Remove the internal assembly which is mounted in the bowl.

SY3000/5000/7000 Series Plug-in Type

For this reason, use caution that the valves with external pilot specification cannot be pressurized from exhaust port [3/5(E)]. As compared with the types which do not integrate the back pressure check valve, C value of the flow rate characteristics goes down. Please contact SMC for details.

SY3000V-OMY0001

C 4(A)2(B) 4(A)2(B) , [D ] SY 90 [E ] 60 MAX.

Integrated solenoid valve and speed adjustment mechanism; Compatible with UR3(e), UR5(e), UR10(e), and UR16(e); URCap downloadable; Standard ISO9409-1-50-4-M6

(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6