HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

LEKF-OMZ0035

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

NAAMS Standards Compliant

mm offset: Machined 25 mm offset: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0

Heat Resistant 2-Color Indicator

Indicator light Operating Range [mm] Auto switch model Bore size 16 20 25 32 40 50 63 D-M9NJ D-M9PJ 4.5 4.5 4.5 5 4.5 5 5 22 64.5 4 Since the operating range is provided as a guideline at room temperature, it cannot be guaranteed. It may change substantially depending on the ambient environment.

HRX-OM-O021

500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

CC

1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28

CYP

Proper auto switch mounting position A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 Cylinder model CYP15 93.5 24.5 CYP32 122 33 Auto Switch Mounting When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

VP300/500/700

) (D, Y) VS N.C.

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

PSxx-OMM0006CN

(4 2.5) (19 ) M35 L(2 )M45 L(2 ) M3:0.50.7 NmM41.41.6 Nm A D(ZS-24-A/ZS-24-D) (01/N01 ) (W1/WF1 ) M35L M45L A D A D M8(3),M8(3).

PC Wiring System Series PCW

Clamping tool PCW-994518 7 Series PCW Branch Unit: PLC Direct Connected Type Specifications PLC connection Weight 25 g Ambient temperature 25 to 55C Note) Since some series PCW specifications are included in the common specifications, also refer to the common specifications on page 7.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Grommet/2 wire Connector/2 wire Reed No D-R80 D-S79 Grommet/3 wire (NPN) D-S7P Solid state Yes Grommet/3 wire (PNP) D-T79 Grommet/2 wire, Connector/2 wire A connector type is not available for solid state 3 wire switches.

MRQB-OM0002

11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46 27 32 10 4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41(41.5) 41.5 80190 31.5(32) 32 ( ) : D-A72A7HA80H 25 7. 7. 7. 7. 7.1 7.2 (7.1)A A ON A B A OFFB ON (7.2)A A ON A B A OFFB ON 26 8. 8. 8. 8. 8-1

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

22 3.2 6 8 10 12 3.2 4 6 8 10 31.5 32 35 39 43 D VT Color: White VP VG L DIN rail VP 12.5 (Pitch) 5.25 7.5 AXT100-DRS070 As for , enter the number from the DIN rail dimensions table. 25 35 5.5 VQ 12.5 L Dimension L = 12.5n + 10.5 VKF Each manifold can be mounted on a DIN rail.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3