Cooling Capacity: CH1: 9 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

Cooling Capacity: CH1: 9 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

Cooling Capacity: CH1: 19 kW; CH2: 1 kW, Pipe Thread: N [NPT (Rc-NPT Thread Adapter Set is Included)], Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], DI Option: DI (CH1, CH2 w/Electric Conductivity Control), Pump Option: -

PFxx-OMP0001CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

DOC1023126

Parallel I/O input circuit NPN specification (EQ--B5) PNP specification (EQ--B6) External Inside the electric actuator External Inside the electric actuator Internal power supply 24 VDC To internal circuit IN0,IN1 10 k 10 k 2.7 k To internal circuit IN0,IN1 100 2.7 k Parallel I/O output circuit NPN specification (EQ--B5) PNP specification (EQ--B6) Inside the electric actuator External

CU

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Card Motor

DRIVE DRIVE A6 A6 SVON SVON A7 A7 Internal resistance 10 [k] Internal resistance 10 [k] NC NC A8 A8 2 mA or more is needed for the input to be ON. 2 mA or more is needed for the input to be ON.

20

K Conical structure of check valve tip K Seal structure with minimal leakage This structure achieves smooth flow through the channel. The surface-to-surface design allows super-tight sealing.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 2 Calculate corrected air flow by using A or B and C. Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) 3 Select a model having an air flow capacity that is higher than the corrected air flow.

XLAQ/XLDQ

L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

IDUS/IDFS

Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 3 2 Calculate corrected air flow by using A or B and C.

VHK

Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.

ZSE F/ISE

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSE F/ISE --62(L)-(M) 50 60 50 60 ZSE F/ISE --70(L)-(M) 50 60 50 60 ZSM With analog output With auto shift input PF2 (Brown) DC (+) 1.2 k (Brown) DC (+) IF (Gray) Analog output (Gray) Auto shift input 6.8 k 1 k 12VDC to 24VDC 12 VDC to 24 VDC (Black) OUT 1 (Black) OUT 1 Data (White) OUT 2 (White) OUT 2

VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

VHK

Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.

R

L E R O D E N D NCRA1BW30 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW50~100 L G H J K L M N S* U UU W P A B C D DD F Model (NPTF) -0.000236 -0.000669 -0.000236 -0.000669 -0.000276 -0.000787 -0.000276 -0.000787 0 -0.00205 0 -0.00244 0 -0.00244 0 -0.00244 7/16 1.42 5/16-18UNC Depth0.31 0.2 9/16 0.79 0.59 5.67 (6.97) 3.86 4.65 0.62 1/8 2.44 1 7/8 1.81

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350

Digital Flow Switch (Remote type sensor unit)

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

V

O R E ( M M) 90 90 180 180 270 270 b h Model A B C D E F N Q R G H J K L M P l 50 2 80 3.14 100 4 0.16 0.16 NCRB50 2.64 3.38 0.77 1.55 0.47 0.98 1.18 M6x1x10 NPT 1/8 0.79 0.12 0.39 0.51 0.20 0.53 1.34 1.97 0.20 0.20 NCRB80 3.74 4.06 0.93 2.11 0.67 1.18 1.77 M8x1.25x13 NPT 1/4 1.42 0.12 0.51 0.63 0.20 0.75 1.57 2.75 0.28 0.28 NCRB100 4.92 4.92 1.18 2.56 0.98 1.77 1.97 M10x1.5x13 NPT 1/4 1.57

Air preparation filter

Dimensions H Bracket K L N M D Auto drain (MAX1.6MPa) C I Bracket (accessory) () P E A F J B 1/4 1/4 female Maintenance G OUT IN Drain space Drain guide A A 3/8 female 3/8 G Maintenance Drain space Thread type Rc, G: 10 NPT: 3/8 Rc,G10 NPT3/8" Maintenance space Drain G Auto drain (MAX1.0MPa) Auto drain (MAX1.6MPa) Drain guide B C D E F G Model Port size A AFF,AM,AMD 70D 11 1/2