Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show

AMP

CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)

RHC

G5-S CV MVGQ CC RB J D-X 20Data 10-6-9 9 Series RHC Construction: 20 to 40 u q !

AMPSeries

When selecting an exhaust cleaner, refer to the selection method shown below, as the selection method will differ for exhaust from actuator drive systems, etc., and exhaust from ejectors, etc.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

The cushion effect (smooth start-up, soft stop) is not available an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop with the above information taken into account, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3 MPa.

Ejector Valve Unit Series ZYY/ZYX 1

Never use in an atmosphere of explosive gases. The strucuture of pressure switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in locations with sources of surge generation.

Clean Exhaust Filter

Note 5) The materials with an asterisk (*) are used for the One-touch fitting type only. Note 6) Due to the softness of polyurethane tubing, it may fold when being inserted.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

The cushion effect (smooth start-up, soft stop) is not available an intermediate stop or return from an intermediate stop using an external stopper, etc. When using an intermediate stop with the above information taken into account, implement measures to prevent particulate generation and set the operating pressure to no more than 0.3MPa.

3 Port Solenoid Valve/

An accumulation of undetected faults can cause loss of safety function. Category 4 It has redundancy so there is no loss of safety function with a single failure. The safety function must be checked before each use. An accumulation of undetected faults does not affect the safety function. (Higher DC and MTTFd than Category 3.)

HRS090 AND LARGER CAPACITIES. Chiller. 140.00000 lb. O88.

HRS090 AND LARGER CAPACITIES. Dual Channel Chiller for Lasers. 330.00000 lb. O88.

HRS090 AND LARGER CAPACITIES. G Thread Adapter Set. 0.66000 lb. O88.

Flow Sensor, HRS090 AND LARGER CAPACITIES, O88, 0.48000 lb

COMPACT DUAL/BASIC CHILLER FOR LASER, HRS090 AND LARGER CAPACITIES, O88, 114.00000 lb

COMPACT DUAL/BASIC CHILLER FOR LASER, HRS090 AND LARGER CAPACITIES, O88, 114.00000 lb

Packaging Materials Set, HRS090 AND LARGER CAPACITIES, O88, 83.00000 lb

Thermo Chiller, HRS090 AND LARGER CAPACITIES, O88, 134.00000 lb

Thermo Chiller, HRS090 AND LARGER CAPACITIES, O88, 134.00000 lb

1 NPT Conversion Fitting, HRS090 AND LARGER CAPACITIES, O88, 220.46000 lb

Thermo Chiller, HRS090 AND LARGER CAPACITIES, O88, 140.00000 lb