Fan Type Ionizer

The angle adjustment range of the bracket is 50 degrees in direction A, and 90 degrees in direction B. 2) Installation without bracket Direction B 90o Direction A 50o M5 If a bracket is not used, install the product using the M4 screw holes (depth: 6 mm) on both sides of the body. Be sure to secure both sides of the body when fixing this product.

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Guide Table Series MGF ø40, ø63, ø100 1

-X Clear anodized Nickel plated Carbon steel Aluminum alloy Body Hexagon socket head cap screw B q !3 Hard anodized Nickel plated Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy w !4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !

HEC-OM-U015

Z A B . (M5:3.0Nm, M6:5.2Nm) Jan o To Uo Vo . Zo Ao Bo . Internal sensor value for alarm = Internal sensor value Fine control value 5.4 Piping Feb P TP UP VP . ZP AP BP . Setting value memory function Ensure that the power source and the power supply of the product is Even if the power is turned off the set values are saved and will be restored at power on. Mar Q TQ UQ VQ .

Flow sensor

PFMV5 series recommended fitting list One-Touch fitting/Series KQ2 Type Tube dimension mm Port size Model Male Connector KQ2H04-M5 4 M5 x 0.8 Hexagon socket head male connector KQ2S04-M5 Male elboe KQ2L04-M5 One-Touch mini/Series KJ Type Tube dimension mm Port size Model Male Connector KJH04-M5 Hexagon socket head male connector KJS04-M5 4 M5 x 0.8 Male elboe KJL04-M5 Miniature fitting/Series

HRX-OM-W032

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3.

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(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl

IDX-OM-W032

(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.

Pressure Sensor

M5 R06 R07 N01 Port size M5 x 0.8 male thread 6 reducer type 1/4 inch reducer type Wetted parts material Pressure sensor: Silicon, O-ring: NBR Body: Stainless steel 304 Body: PBT With sensor cable (3 m) 41 g 38 g Mass Without sensor cable 7 g 3.8 g -12No.PS-OME0004-G Analog output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -101 to 101 kPa -101

JAS

Meter-out: Gray Meter-in: Light blue Thread type Nil R N NPT G G Stud position A Right side B Left side Applicable tubing O.D.1 Stud position left/right is defined with hexagonal socket visible and knob facing upward.

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.

CYP_EN

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

HEC-OM-R008

Use N NPT 5 AC100-240V M5,M6 screws (bolts) or equivalent to the fix the product. Note) Only HECR010 with AC200-240V Be sure to correctly tighten all screws to the required torque.

VZM500

PBT ADC Material Note i Description Material q Description Valve seat (B) Valve seat (A) Pilot body Body Metallic plated ZDC only for external pilot Black zinc chromated o !0 w e Valve assembly Valve spring Return spring Spool spring Head cover Spool valve assembly End cover Piston Plunger NBR ZDC !1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

GA342

Other M5 size hole at the left side of the adapter plate is a breathing port for spool valve. Do not plug or tighten it. Rc 1 1 2, 3 4, Rc 1 1 2, 3 4, (P port) (A port) Rc 1 1 2, 3 4, (R port) 1808

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

IDX-OM-O004C

R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2 12.R 12.5 IDF15E1-10-R IDF15E1-20-R N L N L GFCI GFCI PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 C11 FM FM PRS PRS P P CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB GFCI 12 3 13.S S 13

Miniature Regulator ARJ310 Series

x 0.8 NPT1/8, M5 x 0.8 Rc 1/8 Symbol NPT 1/8 4 One-touch fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Quick Exhaust Valve Series AQ

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

Air Catch Sensor

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis