Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: w/o Lead Wire, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: NPT1/8, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: R1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Nil S n 21 22 Relief type Vacuum suction type Auto switch D-A93 D-M9N, D-M9B Reed switch Solid state Action D Double acting The minimum stroke for auto switch mounting and operating range are the same as standard products.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., DIGITAL PRESSURE SWITCH, PRESSURE SWITCH, ISE1-6, N59, 33 lb

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

Mounting style Nil L F G Basic style Transaxial foot style Rod flange style Head flange style Number of auto switches 2 pcs. 1 pc. n pcs.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Port type Size Size 30 50 63 80 100 Nil M thread M5 30 50 Rc 1/8 1/8 1/4 3/8 TF G TN NPT TT NPTF 63 80 100 Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

Compact Cylinder With Solenoid Valve Series CVQ 32, 40, 50, 63 How to Order CVQ B 32 30 M9BW 5 M Port thread type Mounting 32 40 Through-hole, Both ends tapped (Standard) Foot Rod flange Head flange Double clevis M5 x 0.8 B Nil Rc G NPT L F G D 50 63 F N Piping Mounting brackets are included, (but not assembled).

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.