Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Lead wire length (m) Load voltage 5 (Z) Applicable load Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 1 (M) 3 (L) AC DC 12 V In-line A93 M9N M9B Reed auto switch 24 V 2-wire 100 V 12 V Relay, PLC Grommet Yes 3-wire (NPN) Solid state auto switch 24 V Relay, PLC Grommet Yes 12 V 2-wire Lead wire length symbols

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

P PD1 PD1 PD3 Supply valve Regulator Air filter 9. When using the male thread mounting type product, do not loosen the bottom nut shown in the figure below. (The bottom nut is intended to secure the connection between the bracket for the adapter connection and the male thread.) PD3 Circuit without release valve (Usage example of vacuum connection) V V PD2 PD2 Supply valve EXH.

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

CU

Oil proof heavy duty vinyl cord: 2.7, 0.5m D-F9N(V), D-F9P(V): 0.18mm x 3 cores (Brown, Black, Blue [Red, White, Black]) D-F9B(V): 0.15mm x 2 cores (Brown, Blue [Red, Black]) Note) Refer to page 7 for auto switch common specifications and lead wire length. Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Auto switch model Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Load voltage Indicator light Applicable load Perpendicular In-line Special function Type Electrical entry Wiring (Output) AC DC 100 V A90 A90V 5 V, 12 V 100 V or less IC circuit No Relay PLC 24 V Reed switch Solid state switch 2-wire A93 A93V 12 V Grommet Yes A96 A96V IC circuit 5 V 3-wire (NPN equiv.)

MK

A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F P5DW 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Grommet Yes 100 V 12 V Relay, PLC 2-wire 24 V Connector 12 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic output

3

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Body Size: 20, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

Body Size: 20, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

Model: V (Swivel Elbow), Applicable Tube OD: Ø4, Applicable Tubing: B (Brass Sleeve), Port Size Applicable Tube: 01 [R(PT)1/8]

Body Size: 20, Thread: Rc, Port: 01 (1/8), Option: E [Square embedded type pressure gauge (with limit indicator)], Attachment: V (Residual Pressure Relief 3 Port Valve), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20A, Thread: N (NPT), Port Size: 01 (1/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: E [Square embedded type pressure gauge (with limit indicator)], Attachment: V (Residual Pressure Relief 3 Port Valve), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 20, Thread: N (NPT), Port: 01 (1/8), Option: Standard, Attachment: V (Residual Pressure Relief 3 Port Valve), Semi-Standard 1: 3C (3 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: Standard, Attachment: V (3-Port Valve for Residual Pressure Release), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: 01 (Rc1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))

Body Size: 1, Set Pressure: 2 (0.02 to 0.8 MPa), Exhaust Direction: 0 (Bottom Exhaust), Thread: N (NPT), Port Size: 01 (1/8), Option: BG (B + G), Semi-standard: RVZ (R + V + Z)