100

8 (Metric) 04 2 x Rc1/2 (Branch specification) F06 G3/4*2 *3 The same thread type selected for e is used for the port. t Supply valve/Release valve combination u Electrical entry F04 2 x G1/2*2 (Branch specification) N06 NPT3/4 5/16" (Inch) N04 2 x NPT1/2 (Branch specification) L plug connector M plug connector L: Lead wire length 0.3 m M: Lead wire length 0.3 m K1 Supply valve (N.C.),

Electric Actuator

MBR RA2 Electromagnetic brake interlock DOCOM 13 S/S Y000 PP 23 COM1 Y010 NP 25 10 m or less COM3 15 LA A-phase pulse detector (Differential line driver) Y004 CR 5 16 LAR COM2 17 LB B-phase pulse detector (Differential line driver) 18 LBR X;;; INP 10 19 LZ Z-phase pulse detector (Differential line driver) 20 LZR LECS; X;;; Control common RD 11 14 LG X;;; OP 21 Plate SD LG 14 SD Plate Specific

7

Usage 2 x 3 CK-P04 Knuckle pin Clevis pin 4 4 57 Note) Cotter pins and flat washers are attached to the pin as a standard. 430 CK1 Series Options Limit Switch Mounting Base/Dog Fitting 50 75 Material: Rolled steel 4 x M5 x 0.8 17.3 58.7 5 30.2 Part no.

Clamp Cylinder Series CK1

PLC Note 1) P4DWZ 5 m 2-wire (14) 2-color display DP79WSE 24 VDC Pre-wired connector 0.3 m Reed auto switch DC / AC magnetic field Series CKP1 P74L -X 3 m 1-color display 24 VDC 100 VAC Grommet 2-wire P74Z Individual -X 5 m Note 1) PLC: Programmable Logic Controller Note 2) There are other applicable auto switches other than the listed above.

Series AP3100

Specifications AP3260 Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 40 to 194F (40 to 90C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.06

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Digital Flow Switch Series PFA For Air Series PFW For Water

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 14 For Air Digital Flow Switch Series PFA 4. Output Specification Selection Mode For For Flow rate setting SET SET Press the SET button.

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Process Valve Series VNA

A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 VCC 20 24 24 70 92 109 413 Series VNH Specific Product Precautions Be sure to read before handling.

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Booster Regulator/Air Tank

Then, the charge time (T) for a 10 L tank: T = t x = 3.2 x = 32 (s). V 10 T = t x = 89 x = 89 (s).

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CL Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size Pulling force Stroke (mm) MLGC M2.5 X 0.45 X 25l 4.9N 2 M3 X 0.5 X 3l 10N 3 CNA M5 X 0.8 X 40l 24.5N 3 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. CB wThe lock piston is pushed further upward.

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 3 3 X 18l 46 38 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 3 3 X 18l 55.5 47.5 4 0.050 0.093 CDP-4A 63 16 Polishing ball 16 4 4 X 25l 71 61 5 0.050 0.093 CDP-5A 80 18 Polishing ball 18 4 4 X 25l 76.5 66.5 5 0.065 0.117 CDP-6A 80 100 20 Polishing ball 20 4 4 X 30l 83 73 5 0.065 0.117 CDP-7A 100 25 Polishing

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Grease pack part no.: GR-L-010 (10g) MGT D-X Individual -X 415 Series MGF Dimensions: 40 MGF40 120 4 x M8 x 1.25 through 100 100 120 90 9.5 8 46 + Stroke 36.5 + Stroke 7.5 18.5 2 x Rc, NPT, G 1/8 Breathing hole for guide (with element) 38 When the cylinder is extended Port for extending cylinder Port for retracting cylinder 114 4 x M8 x 1.25 through M5: T-slot for hexagon bolt K 3.5 40 100

Miniature Fittings (For exclucive Miniature Tubing) Series M

When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 15-6-28

M-E05-1-LQ1

10 x 8 LQ1E41-T-R2 4 4-12 LQ1-4N12 LQ1-4B12 8 x 6 LQ1E41-T-R3 4 4-12 LQ1-4N12 LQ1-4B12 6 x 4 LQ1E41-T-R8 4 4-12 LQ1-4N12 LQ1-4B12 19 x 16 LQ1E41-T-R9 4 4-12 LQ1-4N12 LQ1-4B12 25 x 22 LQ1E51-T-R8 5 5-19 LQ1-5N19 LQ1-5B19 25 x 22 LQ1E61-T-R1 6 6-25 LQ1-6N25 LQ1-6B25 19 x 16 Inch size A side B side Part no.

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

Pilot Operated

F (P.C.D) D B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5 75 75 Normally closed VXD2272 VXD2382 VXD2392 Normally