T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Air Slide Table Series MXS

(kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 MXH W Mp Mr W MXU W My L3 A6 W L1 A2 L2 A4 MXS W Mey Mep MXQ Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position.

VCA

A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 8 Series VCA Manifold Exploded View Series VCA20 Description No. 1 2 3 4 Part no.

AC Servo Motor Driver (Pulse input type)

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

FHG

L-block female threaded companion flange S-block companion flange S-block female threaded companion flange 1/2B, 3/4B, 1B A B C 074 105 149 74 m 105 m 149 m 1 1/4B, 1 1/2B, 2B 2 1/2B, 3B Length below flange neck (T dimension) M Micromesh Element Standard T dimension T dimension when shipped Symbol Length (mm) 310 380 450 520 590 385 485 585 685 560 650 750 850 Port size (Nominal size) Adjustment

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment MG Va Calculation Example CX m Operating Conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

MY1

X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) "m" is a weight movable by thrust.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Air Cylinder NCM Series Stainless Steel Cylinders

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

Process Valve

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type Other (Semi-standard) Non-locking push type Power consumption DC Holding Inrush Apparent power AC VNB11V VNB12V TQ 12 (P1) 12 (P1) External pilot solenoid Manual override Note 1) For How to Order pilot solenoid valves, refer to page 570.

IDX-OM-Z004

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

Miniature Guide Rod Cylinder Series MGJ

6 w i !4 !3 y u r !1 q t !2 !5 e !1 No.

2-Color Display Digital Flow Switch Series PFM

Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M ZS-33-

HRX-OM-T002

drawing shows HRS090-W-20.)

HRX-OM-R026

The anchor bolts are not attached. 10 Copper, bronze and brass is not included when option M [ DI water (pure water) piping] is selected. 9.1 Specifications HRSH Series 9-2 HRX-OM-R026 Chapter 9 Documents 9.1.3 HRSH090-W-20Table 9-3 Specifications [HRSH090-W-20-] Model HRSH090-W-20Cooling method Water-cooled refrigerated type Refrigerant R410A (HFC) Control method PIDcontrol Ambient temperature1

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !