High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

T) (mm) Dimensions PB T U Model LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm PA 28 9.6 34 17.5 A B 35 20 U 57 25 With flow rate adjustment & bypass (Max. T) (Max.

Refrigerated Air Dryer

S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

q"s

t signal (%F.S.)

Floating Joint

Type: JAF JAF180 200--X530 4 x J Center of sphere M U U D 60 G P T B C H R A Dimensions (mm) Maximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D T J G H Weight (kg) Nominal size Pitch 180 JAF180-40-150-X530 40 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.1 200 JAF200-45-150-X530 45

Guide Cylinder Series MGG

M N 4-O T Q 2-P AH AG S K W U L B AL I 4-AK hole R AA AP J X AB A Y + Stroke V AI Z + Stroke AJ For 4-AO AG AN AI Cutout window 100 piston rod end connection AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P A 75, 100 125, 150 200, 250 300 63 80 100 M12 x 1.75 depth 23 100 66 180 135 117 65 228 60 M12 234

KB

KBB Female Connector Socket: KBS KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R1 2 R3 8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(MPa) Operating pressure P (MPa) Data Graph (5) up to 500 mm/s Graph (8) up to 450 mm/s 160 700 80 80 140 600 10 120 500 Load weight m (kg) Load weight m (kg) 100 63 63 400 80 300 50 50 60 200 40 40 40 32 25 20 32 100 20 0 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P (MPa) Operating pressure P (MPa) Operating pressure P (

CXT

PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

51

Foot: CG3LN Bore size Stroke S+ Stroke H t (Clearance)1 GB GA 2 x P Width across flats NA With rubber bumper 8 x J Rod part A MM AL I H1 C Width across flats B1 B (LT) 15 LH H2 D W Width across flats KA W 2 x LC (Knock pin position) C Y X M 4 x LD X Y LX LZ Sectional view of the rod part LS+ Stroke ZZ+ Stroke Z 1 The rod end nut should be mounted in the position t (clearance) so that it will

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to "Flow Characteristics" (p.4.6-9) and figure of "Max. air flow" (p.4.6-8).

KK/KK13

P-80 (D)

HRL

Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 323 C O N T E N T S HRL Series Dual Channel Refrigerated

RSH

(Resin or rolled steel) LVariation Standard stroke (mm) Bore size (mm) Series Mounting Action Rod end configuration Standard variation Built-in magnet Locking Cancel cap Proximity switch Option 15 20 30 40 20 32 50 63 80 P P P P P P P P P P P P P P P P P P P P P P P P P Double acting Lever style Double acting with spring RSH Flange Adjustable Single acting 4.3-1 Heavy Duty Stopper Cylinder

IDX-OM-W034

IDX-OM-W034-B PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFB22E-11 IDFB22E-11 K,R,S,T,V IDFB22E-23 IDFB22E-23 K,R,T,V IDFB37E-23 IDFB37E-23 K,R,T,V IDFB55E-46 IDFB55E-46 L,R,T,V IDFB75E-46 IDFB75E-46 L,R,T,V This manual is intended to explain the installation and operation of the product.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

VZ1000

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

IDX-OM-O004C

1.25mm 2 () () 14 2 14.T 14.5 IDF15E1-10-T IDF15E1-20-T 2 1 L N TB PE 3 L N PE 1 2 3 TB MC TDR MC TDR ILS ILS MC MC TDR TDR PTC PTC OLR OLR MC MC CM CM C01 C02 MC MC C11 C11 FM FM PRS PRS P P TDR MC TDR MC CM PTC PTC C01 FM PRS C02 OLR TB C11 ILS TDR MC 14 3

e-Rodless Actuator

The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 14 e-Rodless Actuator Series E-MY2 Names and Functions of Individual Part Controller detail w t q u End Motor I/O cable Controller Power supply cable Slider i y e r Switch FG terminal Motor side end Description Content/Function q w e r t y u i Stroke learning switch Description Content/Function Switch to move the actuator to intermediate