High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

= 26n + 172 11 to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

CEx-OMB0060

Output form O: 1SHOT output H: HOLD output C: COMPARE output Reading pre-scale setting Command Block # 0 0 P R [CR] Unit No. Command Check sum code Response Block # 0 0 P R [CR] Unit No. Command Response Status Check sum code data Response data details 1 0 0 0 0 0 1 1 Multiplication Pre-scale value Decimal point position Writing pre-scale setting Command Block # 0 0 P W [CR] Unit No.

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

CYP

P-80 (D)

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

IZT40/41/42

1 DIN rail mounting bracket for controller and high-voltage power supply module e page 22 t High-voltage cable length Symbol For controller For high-voltage power supply module Nil None None U Included Included W Included None Y None Included Symbol High-voltage cable length [m] 1 1 2 2 3 3 i Input/Output specifications Symbol Input/Output Nil NPN P PNP The number of high-voltage cable holders

25

Power consumption reduced 0.45 W 0.35 W CE-compliant (Built-in solenoid valve/PB1011A) Check valve is resistant against foreign matter. Flow passage around the check ball is enlarged and improved for better resistance against foreign matter. Longer life [Life is 1.5 times longer than the current product.]

Air Catch Sensor

Refer to p.0-26 and 0-27 for Safety Instruction and common precaution of the products mentioned in this catalog, and refer to p.3.0-7 to 3.0-9 for precautions on every series.

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

“Going to

Gray (solid) C Green P1 Neon Pink G Red PU1 Purple (solid) R White PU2 TR Purple W Yellow R1 Red (solid) Y Orange R2 TR Red YR Blue (solid) S1 Silver BU1 TR Blue Y1 Yellow (solid) BU2 Med.

•

O-P-30:Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

CEx-OMI0064

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

Electric Slide Table / High Precision Type 《 AC servo motor 》

rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

MGTM MGTL MGPM63 to 100-Carbon steel Flat cylinder w/turntable q MGPL63 to 100-White anodized White anodized White anodized Chromated Chromated Nickel plated High carbon chromium bearing steel Guide plate Bearing guide A Bearing guide B Bearing guide C Bearing guide D Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Carbon steel w e r t y u i o !

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Electro-Pneumatic Proportional Valve Series VEF/VEP

03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 0.1 to 0.9MPa 2 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.