Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 40 64 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 50 74 75,100 40.5 66.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 42 68 10 to 50 63 78 52 9 9 80 92 108 18 8 60 52 78 75,100 For details about the rod end nut and accessory brackets

MLGP

25 25 CNA 20 20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

MLGP

= 50mm V = 200mm/s 26 l2 = 100mm V = 200mm/s 50 50 100 100 100 100 80 80 50, 63 80 80 50, 63 50, 63 32, 40 50, 63 Load weight m (kg) Load weight m (kg) Load weight m (kg) 10 10 32, 40 32, 40 32, 40 25 25 20 20 25 20 25 20 1 10 50 51 100 300 200 1 10 50 51 100 300 200 Stroke (mm) Stroke (mm) 27 l2 =50mm V = 400mm/s 28 l2 =100mm V = 400mm/s 50 50 100 100 100 100 80 80 80 63 80 63 63 63 50

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

A B L1 L2 14 12 A PA B A B 14 SMC A PA B A B A PA 40 (53) L-side R-side L-side R-side (2n-1/8) D-side D-side 14 34 103 2 103 174.5 (Single) 4n-3/8, 1/2 2, 4 port 94 62 59 17 174.5 (Single) 216.5 (Double) 216.5 (Double) 221.5 216.5 (3 position) 221.5 216.5 (3 position) Bottom ported M12 connector L: Dimensions n: Stations n P, R1, R2 port 2 3 4 5 6 7 8 9 10 1 Formulas L 157 L1 L2 L1 L2 176

VZ1000

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Manifold Specifications

398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Compact Cylinder

FV FT L1 2 x FD FX FZ L2 + Stroke B + Stroke A + 2 (Stroke) Rod end male thread Rod End Male Thread (mm) Switch Bore size (mm) A1 L3 L4 12 16 20 25 63.2 67 73 84 24 25.5 28.5 32.5 14 15.5 18.5 22.5 L3 L4 + Stroke A1 + 2 (Stroke) Flange Bore size (mm) Stroke range (mm) (mm) A FD FT FV FX FZ L1 L2 B 12 16 20 25 5 to 30 42.2 25.2 4.5 5.5 25 45 55 13.5 3.5 5 to 30 43 26 4.5 5.5 30 45 55 13.5

5

Clevis Pin x Material: Cast iron 80, 100 L2 Material: Carbon steel (mm) Part no.

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

MY 25 Bore Seal Belt Kit, RODLESS CYLINDER, E02, 17.40000 lb

This has achieved drastic miniaturization and weight reduction.Basic short type * and Basic standard type *, Applicable bore sizes: 16mm, 25mm, 40mm, and 63mm, Easy connection with external guide., Vertical and lateral mouting is possible., High functionality with reduced height and length compared to MY1 series, MY 32 Bore Dust Seal Band Kit, RODLESS CYLINDER, E02, 95.12000 lb

MY 50 Bore Dust Seal Band Kit, RODLESS CYLINDER, E02, 94.40000 lb

MY 50 Bore Dust Seal Band Kit, RODLESS CYLINDER, E02, 120.80000 lb

MY 50 Bore Seal Belt Kit, RODLESS CYLINDER, E02, 82.69000 lb

MY 50 Bore Seal Belt Kit, RODLESS CYLINDER, E02, 105.13000 lb

Standard strokes are available up to 2000mm with a 5000mm long stroke option on some bore sizes.Mechanical joint rodless cylinder , Bore sizes: 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes from 100mm through 5000mm depending upon bore size , With one or two stroke adjusters with or without shocks , Variety of switches and lead wire lengths, MY 32 Bore Dust Seal Band Kit (Z Type), RODLESS

MY 16 Bore Dust Seal Band Kit_B, RODLESS CYLINDER, E02, 37.77 lb

MY 16 Bore Seal Belt Kit, RODLESS CYLINDER, E02, 7.25 lb