VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Doc. no.CM2Y-OM0001H-A PRODUCT NAME MODEL / Series / Product Number CM2Y-ZCG1Y-ZCQ2Y-Z CQSYCA2Y-Z SERIES Contents Safety Instructions 2~5 1. Specifications 6 2. Installation and Handling 6~9 3. Maintenance 10~14 4. Basic Circuit for Cylinder Operation 15 5. Troubleshooting 16~17 6.

VXP21/22/23

) ( ): VXP2130 Apparent power (VA) Inrush Holding Frequency (Hz) 50 20 (32) 11 60 17 (28) 7 Model Power source AC VXP21 DC 50 40 18 60 35 12 AC VXP22 DC 50 50 21 60 45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard

DOC1019547

Doc.no.DOC1019547 PRODUCT NAME Speed controller with indicator Compact Type MODEL/ Series/ Product Number JAS-S* Doc.no.DOC1019547 Contents 1.Saftey Instructions 34 2.Specific Product Precautions 510 3.Applications 11 4.Specifications 11 5.Malfunctions and Countermeasures 11 6.Construction 1213 2 - Doc.no.DOC1019547 Speed controller with indicator Compact Type JAS-S* Series Safety Instructions

VFS4000-OMY0001

B VFS4 3 400 A A B B 1.25-3.5M1.25Y-3L1.25Y-3M COMCOMCOM COMVFS300040005000 AZ683-56A 20VFS4000500010 0.6Nm /01C COM AB VVFS2000-30A-1 1.5m VVFS2000-30A-2 3m 206837-11 VVFS2000-30A-3 5m 206138-11 * VVFS2000-30A-4 7m 66101-224 AMB * VVFS2000-30A-5 10m VCTF24 0.75mm 2 * VVFS2000-30A-6 15m * VVFS2000-30A-7 20m * 10 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

SI unit for EtherNet/IP TM

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

Series LQ3 High Purity Fluororesin Fitting

5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination 1 2 3 4

70pvpump

Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 For details, refer to Best Pneumatics Vol. 16. 17-5-178 17-5-179

Fieldbus system DeviceNet TM compatible SI unit

5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 01h to 10h A8h Get/Set Ch0 analogue range USINT 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA A9h Get/Set Ch1 analogue range USINT 0=Offset Binary 1=Sign & Magnitude 2=2s complement ACh Get/Set Analogue data format USINT -71No.EX-OMN0030-D Analogue Input/Output Unit object (Class: 6Fh) [DeviceNetTM extended

IZx-OMP0064

Power supply connector POWER Connector (e-con) IZS41, IZS42 7 8 12 13 9 1 2 3 4 5 10 11 14 6 Operation NO.

EXxx-OMN0027CN

0 0 1 Bit No. 05 09h(9 ) 6 (1) 7 (0) 07 7 6 5 4 3 2 1 0 Byte 20 Bit No. 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 89 7 6 5 4 3 2 1 0 Byte 21 Bit No. 0 18 1 19 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved -75No.EX-OMN0027CN-D 3 12 1 7 6 5 4 3 2 1 0 Byte28 1 0 A Byte29 A Byte30 A 7 6 5 4 3 2 1 0 Byte61 1 0 L Byte62 L Byte63 L Bit No. 04 09 5 Reserved 6 (

VQC

A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

LEF-OM006xx

.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V

ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc.

o

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

o

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)