Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter

Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specifications: SI Unit Only, Piping Specifications: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specifications: SI Unit Only, Piping Specifications: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -

Output Specification: NPN Open Collector 1 Output, Unit Specification: SI Unit Only, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

Flow sensor

M Type Tube dimension mm Port size Model 4 M-5AN-4 Barb fittings for nylon tubing M5 x 0.8 6 M-5AN-6 -16No.

Clamp Cylinder with Lock Series CLK1

1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with

IZ-OMK0015

Attach the ionizer body and brackets with M5 screws. (5) Adjust the angle of the ionizer body to make the static neutralization effective, and fix with the rotating set screws (M5) of each bracket. (6) Make sure to ground with the ground resistance of 100 ohms or less by connecting DC1(-) lead wire [blue] M5 M5 screws of the power supply cable.

VQ1000V-OMV0001

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10

Multistage Ejector Series ZL112/212 1

Note 2) Fixed unit: kPa Nil F N T Rc 1/2 G 1/2 1/2-14 NPT 1/2-14 NPTF Digital vacuum pressure switch specifications Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 For E (ZSE4) EB (ZSE4B) Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 25 26 65 Lead wire length 0.5 (2.9) m Rated voltage Lead wire length 0.5 (2.9) m DC specifications

Air-hydro Unit

NB NL QB QL R T GA 18 S F 35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98

2/3 Port Valve for Various

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.