CQS

250 125 45 12 101 114 148 181 43 50 57 63 70 94 37 108 16 121 129 146 188 231 57 66 74 83 92 48 137 20 106 119 132 144 157 439 503 567 632 170 182 208 311 375 93 195 25 134 958 1116 150 166 182 197 213 564 643 721 800 229 245 277 406 485 261 Option Weights Unit: g Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end thread 1 2 4 8 Rubber bumper (1) 0 1 2 3 159(153) 181(172) 55(53

CRQ2

White] () OUT () Blue [Black] OUT () Blue [Black] DC () Blue [Black] Indicator light/Display method Proper Auto Switch Mounting Positions Solid state switches A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXT

NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9 23 55 53

Electric Actuator with Integrated Guide

Refer to page 66 for part numbers. 49 53 Non-standard Motor 10mm/6mm lead Series LTF6 Motor Output Ground Ball Screw 100W Vertical Mount How to Order Motor/switch entry direction Stroke E LTF6 K PF 1 G X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8 43.6 44.6 23.5 24.2 23.5 24.2 25.2 32.6 33.7 35.2 32.6 38.3 39.1 40.6 41.8 51.1 52.1 6 7 8 9 12 18 21 24 26 31 42 46 53

MHK2

External grip: 79 Internal grip : 90 MHKL2-16D 16 14 14.6 28.6 164 MHKL2-20D 20 18 16 34 312 MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

15E Port Location MHZ 120 120 MHF MHL 48 B 11 MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port M3 x 0.5 Finger closing port M3 x 0.5 Finger opening port 25 10 MHC C MHT MHY 3-3 depth 6 +0.02 0 53

CC

Flow control valve (With pressure compensation) Enables constant movement even if there are load fluctuations. 4.12-6 Air-hydro Unit Series CC Hydro Unit MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC MTS CC mm Mode Air port size Rc (PT) Oil port size Rc (PT) A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M 3/8 1/2 186 104 64 86 88 53 121.8 151.5 98 35 18 35 104 45 86 45 83 60 CC63-lSl1-

Pneumatic Purification

chromate treatment No screw threads or tie rods are required therefore removal and replacement of element is made quick and easy (AFF) Differential Pressure indicator Internal autodrain Built-in push-to-connect fitting on drain (AFF) NPT in in in in lb (cfm) 6.26 AFF2B-N02C-T 10 1/4 2.48 0.39 1.46 0.84 AFF-EL2B 6.78 AFF4B-N03C-T 26 3/8 2.99 0.39 1.46 1.21 AFF-EL4B 8.04 AFF8B-N04C-T 53

Wedge Cam Operation Provides

External hold: 79 Internal hold: 90 MHKL2-16D 16 14 14.6 28.6 164 Double acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Auto switch A 3-M3 X 0.5 thread depth 6 (Thread for mounting attachment) A 5 4.7 Model MHR3-10R MDHR3-10R SMDHR3, #1 2.3-22 Series MHR3/MDHR3 15 Without Auto Switch: MHR3-15R 3-M3 X 0.5 thread depth 6 P.C.D29 (Mounting thread) 120 120 25 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25 53 34 12h9 0 -0.043 1.5 5 20 43.5 (47) 2 2 3.5e8 0.020 0.038 Open: 13.5 Closed: 9.5 8 0 0.05

MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

3 Port Air Operated Valve Series SYJA300 1

Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3(R) 1(P) NC (PA port) Rc 1/8 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 A B Base mounted: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53

PA300/500/700

Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3(R) 1(P) NC (PA port) Rc 1/8 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 A B Base mounted: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53

VT317

PVT317-53-1A 1 pc.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.