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(Refer to CAT.E501-B "Air Fittings and Tubing" pages 143 and 144 for details.) Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm 100 FG FG 7-2-2 5m 20m5m20m CE1

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

A 5 1 1 9 9 2 2 6 Valve element B B port 3 Port valve 2 Port valve Working Principle Component Parts When the pilot operated solenoid valve !

#1 (#1+#5) : RSH Bore size -lll-DC 80 40 109 54 31 3 6.7 19.4 49 6 12.5 23 SRSH Bore size B, #2 (#2+#5) : RSH Bore size -lll-DS SRSH Bore size B, #3 (#3+#5) : RSH Bore size -lll-CS Note 1) Dimensions with auto switch are identical to the above.

3 b b Nm a Nm 1 2 4 XLD-25 1.5 0.3 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 a M M0.2MPa b b O a 19 XL-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

CS1D125SCS1125, #6 CS1D140SCS1140, #6 CS1D160SCS1160, #6 CS1D180SCS1180, #6 CS1D200SCS1200, #6 CS1D250SCS1250, #6 CS1D300SCS1300, #6 The drawing shows with an auto switch.

: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (

Flow Switch Series PF2W For Water Dimensions: Remote Type Sensor Unit for Water PF2W504, 520-(N)Internal circuits and wiring examples B L to are the terminal numbers. 60 23 Display unit (PF2W30/31) 48.2 1.6 12 to 24 VDC Sensor unit Brown 6 2 1 Main circuit Main circuit Main circuit Main circuit White 8 4 2 NC + Black Switch output 34 54 44 7 3 4 Blue 5 1 3 PF2W52-Port size 40 50 6 4-4.5

/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= 1 -34No.PS-OMS0006CN-G [F 6] 5R.D. <> [F 6] [F 6] -35No.PS-OMS0006CN-G [F10] <> [F10] OFF 2 OUT1 [dUAL]2 [dUAL]2 () () 37 () () () 37 () [F10] -36No.PS-OMS0006CN-G <> (OFF) [F10 ] OUT1 OUT1 OFF n_1 () [F10 ] OUT1 OUT1 OUT1 n1H n1L 2 2 ( ) OUT1 OUT1 ( ) OUT1 () ( ) OUT1 () OUT1 OUT1 OFF -37No.PS-OMS0006CN-G RAnG -101.0

Installation 6 4-1 Air Supply 6 4-2 Piping 6 4-3 Shaft Load Limit 6 4-4 Coupling 7 4-5 Operating Environment 8 4-6 Using Body As Flange 8 5. Setting of Rotation Time 9 5-1 Moment of Inertia 9 11 5-2 Kinetic Energy 12 5-3 External Stopper 1314 6. Maintenance and Inspection 1516 7.

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

load (N) CRQ2 25 20 FS (a) MSQ 25 20 FS (b) Pinion gear 6 5 Output shaft size (mm) Stopping the pinion gear by having it strike against the flat surface of the piston eliminates backlash.

9 @5 @6 !9 !9 @6 ARJ @6Fixed throttle SUP side passage OUT side passage SUP side passage OUT side passage AR425 to 935 SUP side passage OUT side passage i i i ARX AMR !0 !0 !0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.