VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Modular F.R.L. Unit

B B B B B B O S N.C.: Gray N.O.: Black M5 x 0.8 S O 1/4 V Applicable models AC10, AC20 Barb fitting Applicable tubing T0604 Width across flats 17 10 One-touch fitting Bracket mounting size Accessory specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Made to Order

XC88 XC89 Stainless steel 304 S45C CA2 CDA2 Z Z B B 50 50 100 100 M9BW XC89 XC89 Built-in auto switch magnet CA2 CDA2 Z Z B B 50 50 100 100 M9BW XC91 XC91 Built-in auto switch magnet Accessories 1 Rod material Nil N Without bracket Pivot bracket XC91 S45C Mounting B L F G C D T Basic Axial foot Rod flange Head flange Single clevis Double clevis Center trunnion Only for D and T mounting types

KJ

11.6 8.4 9.3 15.3 16.6 15.8 16.8 5.8 6.3 6.3 7.3 b T VMG Applicable tubing Applicable tubing a a Male Run Tee: KJY H (width across flats) Effective area (mm2) Nylon Urethane Connection thread T Applicable tubing O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

2/3 Port Valve

EPR NBR FPM H Stainless steel EPR FPM NBR FPM EPR FPM FPM EPR NBR FPM G H J L G H J L B Polyacetal B Stainless steel, silver Stainless steel, silver N P T H N P T Stainless steel H B Brass or BC6, copper X Brass or BC6, copper Polyacetal B H X Stainless steel Note 1) The option code with "" stands for non-lube treatment.

Shock Absorbers and Rate Controls

l llunbcr llodel (Rell B C .05 t) t t G Eolt Slts w?isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

15

T2 = [s] L 0.5 V (T1 + T3) V T = T1 + T2 + T3 + T4 Duty ratio: Ratio of T to T6 T T6 x 100 T4 varies depending on the motor type and load.

Hydraulic

Keeper plate Material: Rolled steel Rod end nut Material: Carbon steel 30 d JIS class 2 thread 2-d l 0.2 B D C m T H H B Bore size (mm) Bore size (mm) Cap bolt Rod series Part no.

Table of Contents

x T3 5 pcs. t Packing V#6500 AL-61S AL-60S y Gasket AL-62S AL63S 3 pcs. AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Title not found

be soefod only afd reqLr res lhe B type manlal overtide Cannot combine lritl' H or'Y' oplions connector w lh 300mrn lead wire M vvsoz+ i T m"*.r,r*l I Eslle.r{lrq anifold Number of stations. J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i .

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1

AC Servo Motor Driver (CC-Link Type)

Refer to LECSC2-T Operation Manual,chapter 6 for details. Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K