High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

Step Motor Controller

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.

Air Cylinder

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CM3 v CJ2l-lA CG1 V v v v7 10-, 11CG3 v v v v v v v v v v v 25AJMB v v v v v v v v v XB6 MB MB1 v v v v v v v v XB7 CA2 v XB9 CS1 XB13 CS2 v v v v XC3 v v v v v v v XC8 v v v8 XC9 v v v v v v v v v XC10 v v v8 XC11 v v v v v v v v XC22 XC51 XC85 X446 X773 v v X2838 D-X Technical Data 45 A Air Cylinder

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

Air Cylinder Series CA2

/M9(V)/M9W(V)/M9A(V)L types.

MY1

(L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V

Free Mount Cylinder

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

SMC Basic Pneumatics

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

Air Cylinder Series MB

0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 694 Cylinder with Lock Series MNB Selection Graph Graph (5) Graph (2) P P 100 80 63 100 CLJ2 50 40 80 m m 63 CLM2 32 50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"

%silltr

P N E U A T I C T E C H N O L O G Y Fnopennes oF GAsEs t S o T H E R M I C C H A N G E ( B O Y L E ' S L A W ) "...with constant temperature, the pressure of a given mass of gas is inversely proportional to its voltlme", or: P' Y= constant v = 1 i p = 1 p 1 x V l = = p 3 x V 3 p 2 x V 2 Fig. 3.5 illustration of Boyle's Law lf volume V. = 1 m3at a standard absolute pressure ot 101325 Pa is

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

) 12 V 5 V, 12 V IC circuit Diagnosis (2-color indication) Grommet Yes Relay, PLC 3-wire (PNP) 24 V 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit Water resistant (2-color indication) 3-wire (PNP) 2-wire 12 V Auto switches marked with a symbol are produced upon receipt of order.

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Except L kit) F, P and S kits are provided with an exhaust on one side, while L kits are with an exhaust on both sides. Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Contact P/A. DC(+) Sensor input: DC+ 1 to 5V CH3_OUT1 (Orange) DC() N.C. CH4_OUT1 (Pink) DC(+) Internal data error. Sensor input: DC+ 1 to 5V Load Load Load Load Load DC() DC() (Blue) N.C. Shut off the power supply and turn it back on. Contact P/A if it does not recover. Internal data error.

Vacuum Pad with Ejector

Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

Cylinder with Lock

) Grommet Grommet 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 V V

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 417 XLA/XLAV Series Specifications Model XLA(V)-16 XLA(V)-25 XLA(V)-40 XLA(V)-50 XLA(V)-63 XLA(V)-100 XLA(V)-160 XLA(V)-80 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLA 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLAV 5 to 50 1 x 10-6 to atmospheric pressure Operating

48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set