SMC Corporation of America
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6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable M: Common exhaust for the pilot and main valve + + + + D: Push-turn locking slotted type R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

Drain 861 Needle Valve /Bore Through Connector /High Purity Fluoropolymer Tubing LVN/LQHB Series/ / / TL TIL TD TID TH TIH Needle Valve P.938 Tubing O.D. Metric Size Inch Size 6 4 Size Series Appearance 8 10 12 1/8" 3/16" 3/8" 1/2" 1/4" 2 Needle valve LVN 3 LVC 4 LVA Note) Basic size With reducer LVH Bore Through Connector P.941 LVD Tubing O.D.

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Component Parts No. q w e r t No. !7 !8 !

Hygienic Design Cylinder/ISO Standard Type Series HYC 32, 40, 50, 63 Replacement Procedure is P.297 Hygienic Design Cylinder/ISO Standard Type Construction Hygienic Design Cylinder/ISO Standard Type Series HYC 32, 40, 50, 63 Series HYC 32, 40, 50, 63 Replacement Procedure is Replacement Procedure is !6 !5 !8 !7 !9 @1 P.297 P.297 Construction Construction !6 !5 !8 !7 !9 @1 !6 !5 !8 !7 !

Pressure Control Equipment Industrial Filters Replacement Procedure is P.301 20, 25, 32 40, 50, 63 !7 !5 !6 !8 P.301 Construction Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !7 !5 !6 !8 Actuators Modular F.R.L.

U U g n ti a 2 r e p O Applicable Cylinder Model Applicable cylinder *1 Recommended cylinder Bore size Operating pressure JT20 20 JCM20 (Rod end male thread type) JT32 25 JCM25 (Rod end male thread type) 0.7 MPa or less 32 JCM32 (Rod end male thread type) JT40 40 JCM40 (Rod end male thread type) *1: Make sure to use a cylinder with a built-in cushion mechanism.

Cylinder Port: TF (G), Arm Opening Angle: 120°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A020 (25mm Offset Machined ref NAAMS ACA020M), L Arm Mtg Position: w/o Arm, L Arm Style: w/o Arm, Painted Arm: P (Paint)