IDX-OM-W025

Circuit / Operation Principles . 7 2 Chapter 8 Specification for Option C 8 1 Specifications . 8 1 8 2 Precautions for the installation and handling of the product . 8 1 Chapter 9 Specification for Option K 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 Chapter 10 Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

C95Series

10 !

Speed Controller with Uni One-touch Fitting AS Series

Flow Rate and Sonic Conductance AS221F-U01 AS231F-U02 AS421F-U04 AS431F-U04 AS221F-U02 AS231F-U02 AS321F AS331F Model 3.2, 4 10, 12 6, 8, 4 Symbol Metric size 8, 10 4 12 6 8 10 6 Tubing O.D. 1 8" 3 16" 1 4" 1 4" 5 16" 5 32" , 5 16" , 3 8" , Inch size 5 32" 3 16" 1 4" 5 16" 3 8" 3 8" " 1 2 Flow Direction Symbols on Body Flow rate (L/min (ANR)) 180 230 460 260 390 660 790 920 1580 1710 Controlled

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram PCW-EC08Z00 PCW-EC08Z01 2 4 6 8 10 12 14 20 16 18 Power supply terminal block Input/output connector (CS0) 1 3 5 7 9 11 13 15 17 19 14 8 4 2 6 20 16 18 10 12 Input/output connector (CS1) 13 1 3 5 7 9 11 19 15 17 Green Red Connection 1 1 1 1 1 1 1 1 2 2 2 3 4 3 4 CN2 CN3 2 2 2 3 4 CN5 2 2 1 3 3 3 4 CN4 3 4 3 4 CN6 24VDC 4 CN1 4 2 *S2

High-precision Digital Pressure Switch ( compatible)

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -43No.PS-OMV0004-H [F11] Display resolution setting This function is to change the pressure display resolution.

High-precision Digital Pressure Switch ( compatible)

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -44No.PS-OMY0007-A [F11] Display resolution setting This function is to change the pressure display resolution.

High-precision Digital Pressure Switch

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -46No.PS-OMV0009-E [F11] Display resolution setting This function is to change the pressure display resolution.

IDX-OM-W034

161SCFM 226SCFM 300SCFM Press.Dew Point of 37 oF2.8 oC) (182 m 3/h) (273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m

Mist Separator Regulator

AWM20-D AWM30-D AWM40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S G36-10-01 Rc G46-10-01 Pressure gauge Note 2) G36-10-N01 G46-10-N01 NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Ｍ icro Mist Separator Regulator

AWD20-D AWD30-D AWD40-D (1) Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS (2) Set nut AR23P-260S AR33P-260S AR43P-260S Rc G46-10-01 G36-10-01 G36-10-N01 G46-10-N01 Pressure gauge Note 2) NPT (Round type) G36-P10-N01-X30 Z : Both in MPa and psi G46-P10-N01-X30 (3) G36-10-01 G G46-10-01 G36-10-01-L Rc G46-10-01-L Pressure gauge Note 2) G36-10-N01-L NPT G46-10-N01-L (Round type

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20 18.5 19.5 26.4 18.5 6 44 42.5 44 41 23.5 43 23.5 3 5.2 23.5 15 M6 x 1 x 8 12-CY3R25 10.5 111. 33.6 10.5 7 55 53.5 55 52 291. 54 291. 3 6.5 291. 13 M8 x 1.25 x 10 12-CY3R32 101. 111. 41.6 131. 7 65 63.5 67 62 361. 66 361. 5 6.5 361. 15 M8 x 1.25 x 10 12-CY3R40 L Model LD M MM N PW Q QW T TC W WP

3 Port Solenoid Valve Rubber Seal Series SY100 1

Other dimensions are same as grommet type. 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 Station L 4-3-12 13 Series SY100 Type 31 Manifold: Top Ported/SS3Y1-31Stations Grommet (G), (H) 11.5 P = 10.5 (Pitch) n-M3 x 0.5 (A port) 27.5 5 Manual override V100 3 5 G: 300 H: 600 9 R R SY 15.6 (Lead wire length) 28 (For DC) 21.5 10 25 34.5 (For AC) SYJ P P + + + + + VK 4-M5 x 0.8

3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !



Manifold can be mounted to VEX1B33, VEX1230 3. 14-6-2 3 Precision Regulator Series VEX130 3 Specifications VEX1B33M5 01 VEX113 01 02 0 3 VEX123 01 02 0 3 VEX133 02 03 04 0 3 VEX153 04 06 10 0 3 VEX173 10 12 0 3 VEX193 14 20 0 3 VEX1A33M5 01 Model Operation Manual (Push locking slotted type) Manual handle (Push locking slotted type) and Air operated type Internal pilot External pilot can be

C92

14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Series VS

SERIES VSS (METAL SEAL TYPE) SINGLE SOLENOID VSS8-6 VSS8-6 Double Solenoid DOUBLE SOLENOID VSS8-6 VSS8-6 3-POSITION 3-position VSS8-6 VSS8-6 PART LIST Single solenoid Double solenoid 3 position Double solenoid 3-position Single solenoid VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8