ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

6.5 45 16 16 9 8.5 75 70 40 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Max.157 70 110 50 7 30 10 60 25 26 13.5 10 Max.157 130 70 Clevis pivot bracket (E) l3 l1 K2 (Max.) l3 (Max.)

CRB2/CRBU2/CRB1

Y1 M3 5.5 to 8 10 15 M3 X1 5.5 to 14 M3, M4 7.5 to 9 Y1.5 Y = L2 = L1 (3 x P) 15 C2 = C 20 M3, M4 X1.5 7.5 to 18 Y1.5 9.5 to 10 M3, M4, M5 X = 20 30 X1.5 9 to 20 M3, M4, M5 Y2 11 to 13 M3, M4, M5, M6 L1 = Q2 = M 30 40 X2 11 to 22 14 to 15 Y4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 56 Simple Specials Series CRBU2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol:

Air Slide Table

7 7 MXQR-JS8 1.4 6 MXQR-BS12 MXQR12 M4 x 12 18.5 13 12 M4 x 12 20.5 11 M8 x 1 40.8 11 14 29 18 9.5 7 5 MXQR-JS12 1.4 7 46.7 MXQR-BS16 MXQR16 M5 x 16 21 16 13.5 14 M10 x 1 M5 x 16 23 13.5 17 36 11 22 9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6 x 20 25 22 17 19 M14 x 1.5 M6 x 18 27 12 17.5 22 46 13 35 10 67.1 MXQR-JS20 12 67.3 MXQR-BS25 MXQR25 M8 x 20 31 22 19 19 M14 x 1.5 M8 x 18 33 12

Compact Cylinder Series CQS

Model Cushion Auto switch mounting Bore size (mm) 12 16 20 25 12 16 20 25 Standard stroke (mm) Port size Lubrication Action Model Rubber Air 10-CQSXB12 10-CQSXB16 10-CQSXB20 10-CQSXB25 11-CQSXB12 11-CQSXB16 11-CQSXB20 11-CQSXB25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Non-lube Double acting single rod M5 x 0.8 5, 10, 15, 20, 25, 30 5, 10

0.4

L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 2 1 15 14 17 16 25 24 3 13 18 23 4 12 26 19 22 5 11 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details.

High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) Equation L1=16n+118.5 L2=16n+131 n: Station (Max. 20) L n 20 438.5 451 475 485.5 19 422.5 435 462.5 473 18 406.5 419 450 460.5 17 390.5 403 425 435.5 16 374.5 387 412.5 423 15 358.5 371 400 410.5 14 342.5 355 375 385.5 13 326.5 339 362.5 373 12 310.5 323 350 360.5 11 294.5 307 337.5

MB

45 45 60 60 75 85 89 93 105 105 129 129 157 12 16 16 20 20 25 25 92 96 109 109 134 134 163 62 80 80 100 100 120 142 7 9 9 11 11 13.5 13.5 MB-S04 MB-S06 MB-S10 MB-S12 Double clevis pivot bracket B DX DB Z + Stroke DD B 90 B 4-DT A DH DS DA DL DU DU 4-DR DE DC DO DO Without Air Cushion (mm) Bore size (mm) Part no.

MNB

18 32 5 Up to 600 20 75 1/4 40 120.5 65 46.5 104.5 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 32 18 9 Up to 600 90 1/4 20 45 134.5 75 56.5 119.5 17.5 23 68 35 27 14 20 14 12 80 19 13 37 22 11.5 Up to 750 102 1/4 30 45 169 95 72 150 33 22 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE

MNB

18 32 5 Up to 600 75 1/4 20 40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

MGP

20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc1/8 Rc1/8 Rc1/4 Rc1/4 7 13 9 14 32 40 50 63 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 66 44 14 14 M8 X 1.25 M8 X 1.25 18 10 72 44 14 12 M10 X 1.5 M10 X 1.5 21.5 11 M10 77 49 16.5 16.5 M10 X 1.5 M10 X 1.5 28 13.5 WA R S T U VA VB WB Bore (mm)

Modular F.R.L. Unit

77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

NCA1

EA EE G J JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3

CJ2X/CUX/CQSX/CQ2X/CM2X

Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 1/4 25, 50, 75, 100, 125 150, 200, 250, 300 Non-lube Double acting single rod 1/8 1/4 174 Low speed cylinder 10CM2X/11-CM2X Specifications

Programless Controller Series LECP1

no.) 20 A1 B1 Produced upon receipt of order (Robotic cable only) (13.5) A6 B6 1 2 Connector D (14.7) 15 16 Cable type Connector A (30.7) L (11) (10) Robotic cable (Flexible cable) Nil Connector A terminal no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82