High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

PSE200

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

NARM Series

Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.

125

1.30) 220 V 1.27 (With indicator light: 1.46) 23(P2) D b b Air operated External pilot solenoid Internal pilot solenoid Power consumption [W] DC G, L, M 1.0 (With indicator light: 1.1) D 1.0 (With indicator light: 1.1) * Allowable voltage fluctuation for S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% Flow Rate Characteristics/Weight Caution Flow rate characteristics Weight [kg] 1(P)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 7 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: N9 (ø5/16" One-touch Fitting)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N9 (ø5/16" One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)