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Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B Rated voltage (1) VX solenoid coil assembly 02 =+4 7> 01 =+4 7> Electrical option Application 03 =+4 7> Nil # 04 =+4 7> > -/& S 5 % * ,* -05 ( ! 001 # ) # ) #' ) L 5 % ) / *% 06 ! ' 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (?

Attachment Thread type Attachment mounting position Applicable model Port size for intermediate air release Description Symbol Type Symbol Nil Nil N F Rc ACG20: 1/8 ACG30: 1/4 ACG40: 3/8 ACG20 to 40 AF + ARG + [K] + AL NPT Check valve K G AW + [K] + AL ACG20A to 40A Note 3) Drain guide is NPT1/8 for ACG20 and NPT1/4 for ACG30 and 40.

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (

S07 1 1 5 Serial transmission kit 1 set Manifold base part no. 3 sets Valve part no. (Stations 1 to 3) 2 sets Valve part no. (Stations 4 to 5) 2 sets Valve part no. (Stations 6 to 7) 1 sets Blanking plate part no.

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

0.105 to 1.100 MPa4 MPaPressure sensor: Stainless steel 630, Fitting: Stainless steel 304Fluids do not corrode stainless steel 630 and 304R1/4, NPT1/4, G1/4?, URJ1/4, TSJ1/4, Rc1/8Piping direction: Rear/Bottom12 to 24 VDC ?

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316 SS), Range Options: A (Sub-atmospheric), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT), Gauge Port, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC)

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C