CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

4/5 Port Air Operated Valve Series SYJA3000 1

center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

EXxx-OMS0026CN

(8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -58No.EX-OMS0026CN 2 EX600 0 1 2 1 <1> 0 1 DYB SEN3 SI 4 byte 1 byte [0](EX600-DYB)1 byte [1]SI (EX600-SEN3)4 byte 0 Padding DYB(0) 07 Byte0 Byte1 07 Byte2 815 SEN3(1) Byte3 1623 Byte4 2431 Byte5 Padding 2 byte 6 byte 1 Byte0 byte0 DYB(0)

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

IDX-OM-U021

3 3 5 3-5 OFF IDF100150F 3-3 3 2 IDX-DM-U021 3 3-6 1 0 0 1 1 0 2 3 3 2 4 5 5 4 6 7 7 6 3 2 5 4 7 6 0 1 2 3 4 5 OFF OFF5.2 3 3 IDF100150F 3-6 3 3 IDX-DM-U021 3 3-7 2A 80VA 100W DC5V,2mA IDF100150F 3-7 3 4 IDX-OM-U021 4 4 4-1 5 310 4-2 4-2-1 () 300 300 4-2-2 IDF100150F 4-1 4 1 IDX-OM-U021 4 501015 ( ) ,0 IDF100150F 4-2 4 2 IDX-OM-U021 4 OFF 5 4 (4 ) () O O O O 3mm

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

100

2 !3 !6 !5 !1 !4 Component Parts No.

Step Motor Controller (Servo / 24 VDC)

Safety Instructions . 4 2.

IDX-OM-W035

. 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 5-2 (IDFB55E,75E) . 5-3 -1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 K 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1

Membrane Air Dryer

flow rate (L/min [ANR]) Note 3) 2.5 6 25 50 60 86 190 Inlet air pressure (MPa) Inlet air temperature (oC) 0.7 25 25 25 Inlet air saturation temperature (oC) Ambient temperature (oC) 1 L/min [ANR] {In case of Inlet air pressure 0.7 MPa} Dew point indicator purge air flow rate Port size (Nominal size B) 1/4 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 Weight (kg) (With bracket) 0.11 0.25 0.43 0.66 0.78

IDX-OM-W034

. 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly . 4 2 Table of Contents 1 Table of Contents Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch (Only

CG1

2 !3 !4 !5 !

5 Port Solenoid Valve SY Series

Series SY5000 Series SY9000 Weight (g) Weight (g) Port size Flow characteristics Port size Flow characteristics Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 (P, EA, EB) 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal DIN terminal

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

Mist Separator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (4) Part No. thread ty pe (4) Part No. thread ty pe Rc Rc AD37-2-A AD37-D G G NPT AD37N-2(Z)-A NPT AD37N(-Z)-D Appearance and part No.

Micro Mist Separator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc AD47-2-A AD47-D G G NPT AD47N-2(Z)-A NPT AD47N(-Z)-D Appearance and part No.

I/O Configurator (NFC version)

The Remote cannot be reset when Power off. (4) Confirm that the radio button "Pairing mode" is checked. (3) (2) (4) Pairing check window (Wireless Remote (2)) -92No.EX-OMV0017-C 6.5.

DOC1003626

Data display 2 displays data of the type instructed in data instruction 2 (data instruction high 4-7 bits).

NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.