•

12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

Series VQ Base Mounted Metal Seal/Rubber Seal

B) for respective stations of the manifold. The optional specification permits mixture of single and double wiring. See p.1. 10-160 for details. (+) () 9A 9 stations (+) () 9B Hook groove b on shaft a and close the cover.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

Tie-rod Type Hydraulic Cylinder

0.050 0.089 0.050 0.089 40 17 45 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 50 19 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 63 21 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 15 26 13 29 M22 x 1.5 35 30 1/2 57 127 11 25 100 34 80

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

VQZ1000/2000/3000

(2) Standard: 1W AC High pressure: 1W Low wattage: 0.5 W Series Configuration Model C [dm3/(s.bar)] b Cv C [dm3/(s.bar)] b Cv 4/2 5/3 (A/B EA/EB) 12 or less 15 or less 29 or less VQZ1120 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal 42 Single 12 or less 15 or less 34 or less VQZ1121 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 2 position 10 or less 13 or less 13 or less VQZ1220 0.13 0.26 0.54

SZ3000

13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 15 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) B1 2 Scale: 37% 2n1-M5 x 0.8 (A, B ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

C 15 18.3 B 90 91 GC 17 20 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 NN M4 x 0.7 M5 x 0.8 A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 Bore size 11 11 10-0.022 0 12-0.027 0 With air cushion Air cushion type is not available for 21-/22-CJ2.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st or more 15 to 49 st 50 st or more 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or

SZ3000

148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 198 187.5 164.5 17 1-3-30 31 Cassette Type Manifold Non Plug-in Type Series SZ3000 Dimensions: SZ3000 Non Plug-in SS5Z3-60Stations B With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 24 13.3 (Pitch) P = 10.5 24 13.3 16.2 16.2 17 SV 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/Surge voltage suppressor) Applicable connector: 26 pins MIL type

AC

2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25