C95

10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14 18 16 66 86 18 47 40 50 60 63 15 11 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

Table of Contents

Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover A Motor cover B Auto switch Magnet Brake Material Note 200W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

CXS

A B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A B B B 3.8 11.3 9.8 (8.3) 13.8 6 26 24.5 (23) 28.5 10 32.5 31 (29.5) 35 15 40.5 38.5 (37) 42.5 20 33.5 41.5 39.5 (38) 43.5 25 44 52 50 (48.5) 54 32 Auto switch mounting and mounting dimensions are same as those for the standard type.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

•

:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ . (mm)" : 14 145 43 19 190 l DO 23D 15 M14 x 1.5 15 47 143 115 32 71 125 Up to 1600 50 Upto . jOOQ 1 60 43 19 20 212 112 255 ~5 M1 4 x " :1:.5 '15. 47 1'57 126 32 71 SO 14\1': 19 11 6 275 53 177 180 144 78.5 42 20 236 18 M16 x 1.5 15 Up to 1600 38 160 56 'Boresize wI !

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VQ4000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A B A A VQC 10 11 13 12 15 14 11 10 12 13 14 15 SQ 9 8 7 6 5 4 3 2 1 0 3 2 1 0 4 5 9 8 7 6 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ0 VQ4 Name of terminal block (LED) Note ADDRESS NO. STATION NO.

KJ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

HRX-OM-W002

PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M FAN OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station

VQZ1000/2000/3000

pressure release Manual override (33) (41.5) 1.5 C8: One-touch fitting assembly for 8 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 B B B 2 2 2 A A A 4 4 4 B 25 2 A Dimensions Formula L1 = 22n + 24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 L1 L2 L3 354 244

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64