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Series CXS is available in six bore sizes and stroke lengths up to 100mm. This series is very compact and has a very accurate non-rotating specification. It is suited for accurate pick-and-place applications or light duty material handling. The CXS can be used with either reed or solid state switches. Available in clean room versions. Dual rod cylinder with air cushion, Slide bearing or

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., 10MM CXSJ CLEAN ROOM, ACTUATOR, CXSJ COMPACT CYLINDER, E5, 10MM CXSJ CLEAN ROOM, 0.66138 lb, ModelStandard stroke (mm) 102030405075100CXSJM100.0990.1140.1290.1440.1590.198

1

94.3 81 56.5 58.3 82.8 96.1 103.1 11> P 1 B 2 B 2 B 2 2B 3/5 E 4 A 4 A 4 A 4A 11, 12> 50, 51, 52> 255 Series SY3000/5000/7000 Specific Product Precautions 1 Directional Control Valves Be sure to read before handling.

2

40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal

CATALOG

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

Table of Contents

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Compact Hydraulic Cylinder

+ Stroke Width across flats G ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) mB BB GA LX P LW LT F J LH NA T SS S Z X1 mC Y1 R M CD 32 62 58 38 11 16 158 220 11 11 32 40 8 40 3/8 222 30 37 39 32 25 to 800 M10 x 1.25 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 33 36 222 42 25 to 800 32 M10 x 1.25 13 50 85 76 52 14 15 176 241 13 35 50 8 11 1/2 58 43 246 37 40 M10 x 1.25

A

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

Table of Contents

9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n = 2, 4, 6, ) 4 4.5 5 6 6.5

Compact Cylinder

6.6 9 67 76 89 M 77 89 71 9 9 80 92 108 95 131 25, 50 123.5 103.5 111 FT L 4 x FD B + Stroke 80 11 11 99 116 134 FX 75, 100 136 116 116 136 25, 50 135 113 120.5 142.5 FZ A + Stroke 100 11 11 117 136 154 75, 100 147.5 125.5 125.5 147.5 Rod end male thread Standard stroke Bore size (mm) L L1 M 32 40 50 63 80 100 17 38.5 34 17 38.5 40 10, 15, 20, 25 50, 75, 100 18 43.5 50 18 43.5 60 Rod end

Hydraulic

(mm) Bore size (mm) C B BB GA LX P LW LT F J LH NA T SS S Z X1 Y1 R M CD 32 62 58 38 11 16 158 220 11 32 11 40 8 3/8 40 222 37 30 39 32 M10 x 1.25 25 to 800 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 222 36 33 42 32 M10 x 1.25 25 to 800 13 50 85 76 52 14 15 176 241 13 35 11 50 8 1/2 58 246 43 37 46 40 M10 x 1.25 25 to 800 15 63 98 90 63 18 15 186 263 15 42 14 60 10 1/2 65

ZP

(Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending

NCQ2/CQ2

75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) FD FT FV FX FZ L M CZ RR L B A 54 64 63.5 73.5 75 85 B 36 46 43.5 53.5 53 63 A 63 43.5 108 18 60 9 9 80 92 37.5 46 64 63 44 33.5 14 7/16-14UNC M10 x 1.5 8 27.5 80 53.5 11 11 99 116 134 20 77 45.5 53.5 73.5 80 56 43.5 18 1/2-13UNC M12 x 1.75 10 35.5 100 53.5 11 11

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT 111 to 11-34 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

Table of Contents

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

MY1

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

ZP

Vacuum Pad Series ZP Non-rotating 2 to 8: Stroke 6, 10, 15, 25 mm 10 to 32: Stroke 10, 20, 30, 40, 50 mm 40, 50: Stroke 10, 20, 30, 50 mm Type Without buffer With buffer VAC VAC Vacuum entry port Mounting Vacuum entry port Mounting ZX 13-11-2 to 13-11-27 VAC VAC Buffer body Female thread Female thread Male thread Series (Common) ZR ZPT Barb fitting VAC Barb fitting Buffer body ZM Vertical

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

AC Servo Motor Driver (Pulse input type/Positioning type ）

) (Note 11) (Note 11) PD44 38 I (Note 11) (Note 11) (Note 11) PD46 39 40 41 I DI1 DI1 DI1 PD14 42 I EM2 EM2 EM2 43 I LSP LSP LSP PD18 44 I LSN LSN LSN PD20 45 I DOG DOG SIG PD22 46 DOCOM DOCOM DOCOM 47 DOCOM DOCOM DOCOM 48 O ALM ALM ALM 49 O RD RD RD PD28 50 16 19 16.