Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

MY1

Refer to page 30.

KJ

to 30 5 to 7 11 to 13 14 to 16 20 to 22 VMG Connecting Female Thread: G Approx. spanner tightening angle after tightened by hand Recommended tightening torque (Nm) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

Air Cylinder

M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188

CM2

5 M20 X 1.5 15 14 9 28 9 18 24 24 5 15.5 10 30 8 M8 X 1.25 13 20 8 41 20 M10 X 1.25 17 6 M26 X 1.5 15 14 9 33.5 9 22 30 30 5.5 19.5 10 30 10 13 25 8 45 26 M10 X 1.25 17 6 M26 X 1.5 15 14 9 37.5 9 22 34.5 30 5.5 19.5 10 30 12 13 32 8 45 26 M14 X 1.5 M32 X 2 22 8 21.5 18 10 46.5 11 24 42.5 38 7 21 15 39 14 16 40 11 50 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51

Free Mount Cylinder

40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46

Modular Design with Uniform Body Style

27 22 5.4 8.4 60 2.3 28 104.9 AF30-D 1/4, 3/8 53 115.4 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AF40-D 1/4, 3/8, 1/2 70 147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

Tie-rod Type Hydraulic Cylinder

22 1/4 37 106 11 15 50 19 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 63 21 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 15 26 13 29 M22 x 1.5 35 30 1/2 57 127 11 25 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 16 27 13 34 35 32 1/2 66 137 12 32 125 34 80 M14

CL

35 35 40 40 50 50 56 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 69 16 20 20 25 30 36 36 40 14 14 14 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 15 17 17 21 21 16 16 18.5 60 70 86 102 116 145 161 182 32 40 40 52 52 15 17 17 21 21 16 16 18.5 22 27 27 32 41 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5

Cylinder with Lock

R1 S5 32 E5032 32 10 11 260.2 0.6 21 18 31 8 38 51 7 10 10 6.6 40 E5040 36 12 11 280.2 0.6 24 22 35 10 41 54 9 10 11 6.6 50 E5050 45 12 15 320.2 0.6 33 30 45 12 50 65 11 12 12 9 63 E5063 50 16 15 400.2 0.6 37 35 50 12 52 67 11 14 15 9 80 E5080 63 16 18 500.2 0.6 47 40 60 14 66 86 12.5 18 15 11 100 E5100 71 20 18 600.2 0.6 55 50 70 15 76 96 13.5 20 19 11 l3 l1 Single clevis with ball joint

AC

17 25 35 37.5 40.5 48 48 25 40 48 53 70 70 90 95 26 56.8 60.8 60.8 65.5 69.5 75.5 78 25 30 30 41 50 50 70 70 28 34 34 40 54 54 66 66 30 44 44 46 54 56 65.8 65.8 4.5 5.4 5.4 6.5 8.5 8.5 11 11 6.5 15.4 15.4 8 10.5 10.5 13 13 40 55 55 53 70 70 90 90 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5 36 38 44 AR1000 AR2000 AR2500 AR3000 AR4000 AR4000-06 AR5000 AR6000

C85

62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

JXCx-OMT0023

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 21 11.

Table of Contents

(Refer to page 14-19-11.)

Modular F.R.L. Units

33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Battery-less

20 40 60 30 45 60 50 60 80 (2000 [mm/s2]) 10 23 35 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 2 4 8 8 16 30 11 22 43 13 27 53 Pushing force [N]*2 *3 *4 14 to 38 27 to 74 51 to 141 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553 562 to 1058 Actuator specifications Speed [mm/s]*4 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500