ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Square Tube Type Air Cylinder Series MB1

Foot type Foot type/ (L) Cushion valve Port LS Effective thread length Stroke range Bore size (mm) X Y LD LH LT LX LY LZ 32 40 50 63 80 100 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 132 148 148 174 178 3.2 3.2 3.2 3.6 4.5 4.5 32 38 46 56 72 89 53 59 50 55 70 80 100 120 to 500 to 500 to 600 to 600 to 750 to 750 19.5 27 32 32 37 37 LY LH 72.5 4-LD LT 82.5 102.5

Environment

600 LEC Speed [mm/s] Speed [mm/s] LEC S For Servo Motor (24 VDC) LECA6 LEC SS-T LEC Y Horizontal Vertical LEY25Am LEY25m Motorless 40 15 LAT Lead 3: LEY25AC Horizontal work load [kg] Lead 3: LEY25C Vertical work load [kg] 30 11 LZ 10 LC3F2 20 Lead 6: LEY25AB Lead 6: LEY25B 15 5 10 Lead 12: LEY25AA Lead 12: LEY25A 7 2 0 0 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

specifications for up to 11 stations.

Air Cylinder

/32 1 1 15/16 2.36 9/32 2 3/8 6.44 7/16-20 1.71 1.06 1.84 1.26 3/4 2 1/4 3 5/8 200 (2") 5/16-24 3/8 M16 x 1.5 7/16 1.81 5/16-18 2.6 0.3 7/8 9/16 1 1/8 5/8 11/32 1 1 15/16 2.40 11/32 2 1/2 3/8 6.44 7/16-20 1.75 1.06 2.19 1.30 3/4 2 3/8 3 3/4 250 (2.5") 5/16-24 3/8 M16 x 1.5 19/32 1.69 3/8-16 3.1 0 1 1/4 9/16 1 1/8 5/8 11/32 1 1 15/16 2.48 11/32 3 3/8 8.02 3/4-16 2.34 1.10 2.76 1.57 1 1/8 2

ITV

Straight type (4 cores) Cable connector 3 m Right angle type (4 cores) Cable connector 3 m 100 84 50 (33) 52 40 4 x 7 Setting part 12.5 M12 x 1 Cable connection thread (Plug type) 11 71 12 Digital pressure display M3 x 0.5 Solenoid valve EXH Solenoid valve EXH 1/8 (Rc, NPT, NPTF, G) EXH port 11 8.5 SUP OUT EXH (3) 11 1.6 13.5 Flat bracket assembly P398010-600 (Option) 2 x 1/8, 1/4 (Rc, NPT

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 l3 l1 Single clevis with ball joint

C95

12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11 11 38 41 50 52 66 76 18 22 30 35 40 50 31 35 45 50 60 70 15 18 20 23 27 30 51 54 65 67 86 96 32 36

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

Mechanically Jointed Rodless Cylinder Series MY1

MY1C MY1HT (High rigidity/Linear guide type) MY1M (Slide bearing guide type) (mm) MY1H Auto switch model Bore size (mm) 16 20 25 32 40 50 63 Auto switch model Bore size 50 MY1HT D-A9/A9V 63 11 7.5 D-Z7/Z80 D-M9/M9V D-M9W/M9WV 11 11 MY1W 7.5 7.5 8.5 7 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Z7/Z80 12 12 12 11.5 11.5 5 5 MY2C D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 5 5 5 5.5 5.5 MY2H D-M9type cannot

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

HRX-OM-X084

Fig 9-8 Cooling capacity (HRR010-W-20-) 9.4 Cooling capacity HRR Series 9-10 HRX-OM-X084 Chapter 9 Documents 9.5 Heating capacity 9.5.1 HRR010-A-10Fig 9-9 Heating capacity (HRR010-A-10-) 9.5.2 HRR010-W-10Fig 9-10 Heating capacity (HRR010-W-10-) HRR Series 9.5 Heating capacity 9-11 HRX-OM-X084 Chapter 9 Documents 9.5.3 HRR010-A-20600 600 500 Ambient temp.

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

Base Mounted Metal Seal/Rubber Seal Series VQ

SOL.A () () (+) (+) 15 13 6 stations SOL.B SOL.A () () (+) (+) 11 9 7 stations SOL.B Connector terminal no.