Rotary Cylinder Series MRQ Size: 32, 40 1

Refer to pages 11-11-1 when using auto switches. 11-10-17 18 Series MRQ Made to Order Specifications: -X1 to -X5 Please consult with SMC for further information on specifications, dimensions and delivery.

VQ5000

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 C [dm3/(sbar)] 11 11 1 4/2 (P A/B) 0.24 0.24 0.24 b VQZ 2 position

REA/REB

Speed 600 mm/s Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) Symbol 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 High Precision Guide Type REBH Order Made

Compact

800 800 800 m 11LEJS L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 L3 Z 25A400 400 400 400 200 200 200 200 LEC 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 0 5 10 15 20 0 2 4 6 8 10 LEC S Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 500 1000 1000 LEC SS-T 800 400 800 800 L4 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 300 600 600 X 400 200 400 400 m Motorless 200 100 200 200 0 0

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

RSQ

Workpiece transfer direction B + Stroke R R RSQB32-L Bore size: 32 Stroke 2-Rc 1/8 5 10.5 19 14 6 7.5 20 15 4.5 45 58.5 R25 60 36 20 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10.5 31.5 8-9 counterbore depth 7 4-5.5 through 10 (11) 20 (22) 20 48 + Stroke

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2 e (1 pc.) @0 10-11-11 11 Series MIW/MIS Dimensions: Double Finger Type MIW-D 2-P Supply port 3-LA Scraper mounting thread EB FB NB ME PE GD LB JA B FA FC GC GB JB Mounting hole 4-GA LC C EA D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P Attachment mounting

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

MRHQ

0.8 Port A M5 x 0.8 Port B 4-M5 x 0.8 depth 8 8 22 8 12 25 11 6 6 29 Side A Side B 41 12-11-14 15 Rotary Gripper Series MRHQ MRHQ20 A MHZ B 48 59 MHF 78 MHL MHR 38.5 4-M6 x 1 depth 10 51 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.074 26.3 opened +2.2

mb1

Up to 800 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 Courtesy

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

Table of Contents

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

RHC

10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n = 2, 4, 6, ) 4 4.5 5 6 6.5 6.5 7 CE1

Support Guide/11-LEFG Series

530 11-LEFG32-S-450 600 457 580 Model L A B n D E 11-LEFG32-S-500 650 507 630 10 4 600 11-LEFG32-S-550 700 557 680 11-LEFG32-S-600 750 607 730 11-LEFG32-S-650 800 657 780 12 5 750 11-LEFG32-S-700 850 707 830 11-LEFG32-S-750 900 757 880 11-LEFG32-S-800 950 807 930 14 6 900 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 529 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG40-S

T

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Black FR Double Layer Tubing Series TRB White 15-6-17 15-6-11 Red T Slightly flexible 1.0 MPa max. at 20C Black Blue White Soft Nylon Tubing Series TS 15-6-8 15-6-9 15-6-3 15-6-4 15-6-5 Yellow Flame resistant (Equivalent to UL-94 standard, material V-

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C