XLAQ/XLDQ 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
EXH port P1 SUP port Sensor S1 S3 S2 S4 P2 Detection port S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 868 A Air Catch Sensor Series ISA2 Wiring Individual wiring Centralized wiring Terminal block 1: Brown 2: NC 3 0 1 2 3 4 Brown Blue Black DC (+) NC DC () OUT ZSE30 ISE30 OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 6 9 3: Blue DC () NC DC (+) OUT 6 ZSE40 ISE40
Vs: Power supply 24VDC 12 to 15VDC One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa.
Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.
v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).
SOL.B 23 23 () (+) Gray Red 10 stations SOL.B SOL.A 11 11 () (+) White Red SOL.A SOL.B 24 24 () (+) Black White 11 stations SOL.B SOL.A 12 12 () (+) Yellow Red SOL.A SOL.B 25 25 () (+) White None 12 stations SOL.B COM. 13 13 (+) () Orange Red COM. Note) Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.
Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.
ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1
Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date
Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312
Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in Type Conduit terminal 2 position single: VQ410 0 1 23.5 23.5 50 158 50 90 108 158 Indicator light 11(12.5) 11(12.5) 5 3 2(B) port 4(A) port 9 4 2 38 48 10.5 1 11 A B 38 24.6 48 4 2 A 13.5 13.5 30 45 2-5.6 Mounting hole 14 5 1 3 12 30 45 2-5.6 Mounting hole 5-Rc 1/4, 3/8 (5(R1), 3(R2) port Rc 1/4) Manual override Bottom ported drawing 27 4(A),
527 547 n: Stations (11 stations max.)
VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33
How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.
Choo6e Manffold Block porling desired. e.g. # 11, # rg or # 15. 4. To specify a valve hountsd on a manitold blo,ck Inlen manilold numbr into valv numbr i.e. NVS 411+tt09D b a NVS 4114-0O0gD valv6 ,nount6d oo a # 11 blc'*,. 5.
Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .
Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 0 1 G H 2 position single: VQ415 155.5 105.5 155.5 105.5 42.5 50 42.5 50 Indicator light 23.5 23.5 11 (12.5) 11 (12.5) 2(B) port 4(A) port VQC 5 3 4 2 SQ 9 38 48 A B 38 24.6 10.5 48 11 1 A 4 2 VQ0 3 5 1 14 12 13.5 13.5 30 45 2-5.6 Mounting hole 30 45 VQ4 2-5.6 Mounting hole Manual override 5-Rc 1/
11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch
Wiring Diagram (PNP Connection Circuit) Black S1 Load (Unclamping side) Blue () 2 3 1 4 S2 Load (Clamping side) (+) Brown White * Applicable to both TURCK and P&F. * Please contact SMC for NPN specifications. 2 CKZ3N -X2742A -X2568 Replacement Parts Top cover kit Switch kit Stopper bolt kit Switch kit no. Top cover kit no.