CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Note 3) Pin and snap ring are shipped together with double clevis and double knuckle joint. (40 is cotter pin.) 10-3-15 15 Series 10-, 11-CQSX, CQ2X Clean Series Low Speed Cylinder Series 10-, 11The type which is applicable for using inside the clean room graded Class 100 by making an actuators rod section a double seal construction and discharging by relief port directly to the outside of

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

3 11-/22-MXP 6 5 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5

High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Rotary Gripper Series MRHQ

-746 Yes 24V 3-wire (PNP) Grommet D-M9B-746 12V 2-wire MHZ Lead wire length symbols: 0.5 m .

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

(2-color indication), D-M9A(V) Series -X MHK2-12 4 12 Parallel opening/closing MHK2-16 6 16 Standard type Series MHK2 MRHQ MHK2-20 10 20 MA MHK2-25 14 25 MHKL2-12 11 12 DMHKL2-16 14 16 Long stroke type Series MHKL2 MHKL2-20 18 20 MHKL2-25 22 25 521 Wedge Cam Operation Slide Guide Air Gripper/2-Finger Type Series MHK2 12, 16, 20, 25 How to Order MHK 2 20 D 1 F M9B Standard type MHKL 2 20

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Environment

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

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with rod boot on both sides) ZZ + 2 x strokes (mm) Bore size (mm) 125 140 160 Stroke range (mm) B A AL B C D E F FD FT FX FY FZ J W V KA M G K Up to 1000 15 50 47 143 145 115 32 71 43 19 14 190 100 230 M14 x 1.5 17 27 13 15 15 Up to 1000 15 50 47 157 160 128 32 71 43 19 20 212 112 255 M14 x 1.5 17 27 13 15 15 Up to 1200 15 56 53 177 180 144 38 78.5 42 19 20 236 118 275 M16 x 1.5 20 34 15

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) + Nil With drain cock J Note 14) Drain guide 1/8 Drain guide 1/4 g Air filter drain port Note 13) W Note 15) Drain cock with barb fitting: For 6 x 4 nylon tube 235 Air Combination Series AC20B-B to AC60B-B Modular F.R.L.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure Gripping force (N) Gripping force (N) Pressure 0.6 MPa 15 15 0.6 MPa 0.5 MPa External grip 0.5 MPa 10 10 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 5 5 0.2 MPa 0.2 MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6 MPa Internal grip 30 30 Pressure 0.6 MPa 0.5 MPa Gripping

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

10 2 pcs. 15 Operating Range (mm) Bore size Auto switch model 12 16 20 25 32 40 50 63 80 100 D-A9/A9V 7 9.5 9 9 9 9 9 10.5 10 10.5 D-M9/M9V D-M9W/M9WV 4 5.5 5 5 5.5 5 5.5 5.5 6.5 7 D-Z7/Z8 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 11 11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Basic type / Direct mount type Series CY3B/CY3R

M10 x 1.5 x 15 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW

Sine Rodless Cylinder Series REA/REB

C in the case of 15.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 6 10 15 20 25 32 40 50 63 D-A9 9 13 8 5 6 4 D-M9, D-F9W 5 (2.5) 7 (4) D-Z7/Z80 9 9 11 11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.