Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

MXQ

MXQ12-10 MXQ12-10 MXQ12-10 MXQ12-10 0.01 0.02 0.004 0 0 0 160 40 80 120 20 40 60 80 100 20 40 60 80 100 Load (N) Load (N) Load (N) 8-5-12 13 Air Slide Table Series MXQ Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Displacement at A when a load is applied to F with the slide table retracted.

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CL

18 9 13 15.5 8 8 13 6 38 80 4 8 CNS 25 26 83.5 64.5 4 Up to 300 69 10 22 9 13 19.5 10 9 17 9 45 90 7 8 32 8 26 83.5 64.5 4 Up to 300 69 10 22 9 13 19.5 12 9 17 9 45 90 7 CLS 40 11 32 90.5 70 4 Up to 300 76 15 24 10 16 21 14 8 22 11 52 100.5 8 CLQ H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 4 22 19.5 20 38 9 127 14 198 207 41 5 28 5 30 M8 x 1.25 15

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

CL

Up to 300 57.5 13 18 9 8 15.5 8 6 13 38 80 4 8 CNS 25 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 10 9 17 45 90 7 8 32 8 26 83.5 64.5 4 10 Up to 300 69 13 22 9 9 19.5 12 9 17 45 90 7 CLS 40 11 32 90.5 70 4 15 Up to 300 76 16 24 10 8 21 14 11 22 52 100.5 8 CLQ H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 4 22 19.5 20 38 9 127 14 198 207 41 5 28 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Mounting bracket nut Unit holding tie-rod Bore size [mm] Nut Width across flats Socket Width across flats Socket 10 JIS B4636 40, 50 JIS B1181 Class 3 M8 x 1.25 13 JIS B4636 Two-angle socket 13 Two-angle socket 10 13 JIS B4636 Two-angle socket 13 63 JIS B1181 Class 3 M10 x 1.25 17 JIS B4636 Two-angle socket 17 13 JIS B4636 Two-angle socket 13 80, 100 JIS B1181 Class 3 M12 x 1.75 19 JIS B4636

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Refer to pages 8-13-12 to 8-13-13 for detailed selection procedures. 8-13-6 7 Model Selection Series MY2 Moment/MY2C MY2C/M1 MY2C/M3 MY2C/M2 50 40 50 40 50 40 30 30 30 MX 20 20 20 MTS MY 10 10 10 MY2C40 CY Moment Nm Moment Nm Moment Nm MY2C40 MY2C40 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

Title not found

FT1 1/4 FT4 1/4 FT5 1/4 FT6 1/4 FT3 1/4 FT8 1/4 FT2 1/2 17/16 15/16 29/32 15/16 31/32 / 6 3 11/8 11/16 Hex Typ. 111/16 29/32 13/8 13/16 19/32 Typ. 15/16 not shown 13/32 67 1/4 FT2 x 3 1/4 FT4 x 3 1/4 FT5 x 3 1/4 FT6 x 3 1/4 FT3 x 3 1/4 FT3 1/2 x 3 1/4 FT2 1/2 x 3 13/64 25/32 Bulkhead Fittings 25/32 10-32 10-32 5/16 1/4 1/4 1/4 1/4 57/64 10-32 1/4 Hex Typ. 57/64 10-32 5/16 Hex 1/4-28 68 10

15

Size: 25 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 12.4 NY M2.5 x 10 1.00 8 12.4 NX M2.5 x 10 1.00 8 6.9 NM1 M3 x 4 0.63 5 11.9 NM2 M2.5 x 10 1.00 6 10 Size: 32 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5

MY1

MY1B10 (mm) FC Applicable bore size E EA EB EC EY h TT F FB FH FW S T W a Shock absorber model MY1B10 10 5 28 5.5 29.8 8 1.8 40.8 5 5 (Max. 10) 35 RB0805 3.5 MY1B20 RB2015 RB2015 RB1412 RB1007 7 12 20 20 25 31 10 10 12 15 49 57 74 82 6.5 8.5 11.5 12 47.5 57.5 73 87 60 70 90 100 8 8 6 6 33 12 46 13 17 22 22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 15 15 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

F

4 11/16 110 5/32 10 6 75 KM12-03-35-10 21.5 6 17 17 19.5 31.5 31.25 48 13 1/4 95 1/4 10 7 84 KM12-07-35-6 21.5 10 17 17 19.5 31.5 31.25 73.5 13 1/4 11/16 121.2 1/4 10 7 96 KM12-07-35-10 25 6 18.5 18.5 24 37.7 37.5 52.8 15 3/8 102 5/16 12.8 9.5 100 KM12-09-36-6 25 10 18.5 18.5 24 37.7 37.5 83 15 3/8 7/8 132 5/16 12.8 9.5 117 KM12-09-36-10 Courtesy of Steven Engineering, Inc. !

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Thread) ZPT 10/13/16 F J/K 10-0-A10 (With Buffer/One-Touch Fitting) Applicable tube O.D.

REA/REB

10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100 Usable

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

Vacuum Pad: Ball Joint Type

Pad dia. 10 13 16 20 25 32 40 50 Buffer stroke 10 mm 20 mm 30 mm 40 mm 50 mm Inclination 15 (Rotation 30 ) 708 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series How to Order ZPT 25 F GN B5 A8 Mounting Pad diameter Symbol Mounting Pad dia. 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40