MXQ

3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48

MG

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

62.8) 62.3 (DIN 63.6) R P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in one-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5 [65.5] + + + + + 43.1 26.5 (4.9) 63 L plug connector (L) M plug connector

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Non-locking) Manual override SYJ L1 L2 10 13.5 2n-Rc(PT)1/8 (A, B port) (Pitch) P=20.5 A Side SX 4-4.5 (Mounting holes) 16.5 1.5 1.5 6-Rc(PT)1/4 (P, R port) VK 11.5 33.6 63.6 16.6 19.5 2.8 VZ 141.8 21.5 17 R R P R R P 21 21 30 60 16 B A B A B A B A B A 21 62.8 93.6 93.8 VF 94.4 VFR VP7 B Side Triangle mark VP4 VQ 60.5 31.8 8.8 VQ4 26 28.5 Polarity indication VQZ Applicable connector: 26-

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ2-Z Series Air Cylinder/10, 16 10-/1121-/22How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R CRB1 Y Y A1 M1 A2 P 6-Q X A1 (mm) R (RC) E2 (h9) F (h9) E1 (g6) V B W C Model A1 D G M2 X U A2 Y H N P J Z M1 S Q K T L CRB1BW 50CRB1BW 50-E CRB1BW 63CRB1BW 63-E CRB1BW 80CRB1BW 80-E CRB1BW 100CRB1BW 100-E 26 21 29 27 30 29 35.5 38 18 22 30 32 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 11.9 0 0.043 25 0

SY

SS5Y52, #2 50 Type20P SY7000: SS5Y7-20PStations Note) [ ]: Values for AC Scale: 35% L1 2n1-Rc 1/4 (A, B port) 4-4.5 (mounting hole) 10 Manual override L2 (Pitch) P = 20.5 13.5 + + 16.5 11.5 22.8 20 9.4 B B B B B 19.5 21 20.5 19 69.8 76 P EA EB P EB EA 16 60 30 21 21 154.2 20 110 141.2 93.8 A A A A A 6-Rc 1/4 (P, EA, EB port) + + + + + Triangle mark 2n2-One-touch fitting (A, B port) Applicable

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

SYJ300/500/700

21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 24 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

HRX-OM-W002

Z1. 2 Excluded for option Z.

Rotary Actuator

5Fluororubber seal -X16 Page 230 Made to Order/-X6 to -X16 Page 231 DSpecific Product Precautions Page 232 187 Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100 RoHS How to Order B S 50 90 Z CRA1 With auto switch CDRA1 B S 50 90 M9BW Z Built-in magnet Number of auto switches Air cushion Mounting B Basic type L Foot type* Nil None C* With air cushion Nil 2 pcs.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Head Side Trunnion Style Head side trunnion style: CG1TN DZZ 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Bore size (mm) Z ZZ Z ZZ Z ZZ Z Bracket mounting range 20 25 32 40 118 139 143 164 168 189 -X 123 144 148 169 173 194 198 219 2-TD8 (Pin O.D.) 126 150 151 175 176 200 201 225 20143 171 168 196 193 221 218 246 Data Clevis Style Bore size (mm) Stroke range (mm) B CD CZ L RR TE

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Model Product series AC20/AC25/AC30/AC50/AC55/AC60 AC20A/AC30A/AC40A/AC50A/AC60A AC20B/AC25B/AC30B/AC50B/AC55B/ AC60B AC20C/AC25C/AC30C/AC40C AC20D/AC30D/AC40D AR20 (K) /AR25 (K) /AR30 (K) /AR40 (K) / AR50 (K) /AR55 (K) /AR60 (K) AW20 (K) /AW30 (K) /AW40 (K) /AW60 (K) F.R.L. combination Option/Part No.

Pilot Operated Regulator AR425 to 935 Series

Note) Compared with AR25 type, its adjusting spring will only be changed for 0.2 MPa. It is not the product which does not allow the pressure more than 0.2 MPa.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

High corrosive, Oil-free Stainless steel FKM B For VX21: VVX21-3A For VX22: VVX22-3A For VX23: VVX23-3A Table (3) Rated Voltage Electrical Option Seal material Class B Class H Rated voltage S L Z S L Z Nil F E NBR FKM EPDM Voltage symbol Voltage With surge voltage suppressor With surge voltage suppressor With light With light With light and surge voltage suppressor With light and surge voltage