Magnet: Built-in Magnet, Series: J2, Mounting: Basic, Bore Size: 16, Stroke: 150mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch

Magnet: Built-in Magnet, Series: J2, Mounting: Basic, Bore: 16mm, Stroke: 150mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Auto Switch Mounting Type: Band Mounting

Magnet: Built-in Magnet, Series: J2, Mounting: Basic, Bore: 16mm, Stroke: 150mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Auto Switch Mounting Type: Band Mounting

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: H7BA, Lead

Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.), Auto Switch Mounting Type: B (Band Mounting)

Clean Series: 21 [Relief Type (Copper, Fluorine & Silicon-Free + Low Particle Generation)], Magnet: D (Built-in), Mounting: A (Bottom Mounting Style), Bore Size: 25mm, Port Thread: Rc, Stroke: 150mm, Rod End Thread: Male Rod Thread

Clean Series: 21 [Relief Type (Copper, Fluorine & Silicon-Free + Low Particle Generation)], Magnet: None, Mounting: A (Bottom Mounting Style), Bore Size: 20mm, Port Thread: Rc, Stroke: 150mm, Rod End Thread: Male Rod Thread

Clean Series: 21 [Relief Type (Copper, Fluorine & Silicon-Free + Low Particle Generation)], Magnet: Built-in, Mounting: Bottom Mounting Style, Bore Size: 25mm, Port Thread: Rc, Stroke: 150mm, Rod End Thread: Male Rod Thread, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Clean Series: 21 [Relief Type (Copper, Fluorine & Silicon-Free + Low Particle Generation)], Magnet: None, Mounting: Bottom Mounting Style, Bore Size: 20mm, Port Thread: Rc, Stroke: 150mm, Rod End Thread: Male Rod Thread, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

CATALOG

C Y D E D E ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20 65.5 25 70.5 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 A P P L I C A B L E T U B E Applicable Tube OD G H I J 4 4 20.6 15.6 10.4 6 6 21.6 16.68 12.88 F L AT T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3

2

28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AR40(K)-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Table of Contents

(mm) Model D1 Port B Min. port size Weight (g) 11 14 16 22 26 D2 L1 L2 L3 P Q1 Q2 M1 M2 a b KM13-04-06-3 10.4 6 12.8 60 63.5 70.5 74.5 81.5 18 19 20 21 22.5 13 15.5 15.5 19 19 4.5 6 6 7.5 7.5 9.9 11.1 11.1 12.8 12.8 17 18.5 18.5 21 21 10.4 16 4 38.2 KM13-04-08-3 15.2 KM13-06-08-3 12.8 15.2 KM13-06-10-3 18.5 KM13-08-10-3 15.2 18.5 8 8 12.8 17 6 45.4 10 10 15.2 18.5 8 52.6 15-2-44 4 One-touch

Fluoropolymer Piping Equipment

21 52.5 50.5 48.5 45.5 29 25 7.5 LQ3E41-R2 8 6.4 LQ3E51-R1 19 12 7 14 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29 9.5 LQ3E51-R2 10 22.5 19.5 21 61.5 53.5 50.5 25 7.5 LQ3E61-R1 25 19 8 18 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3E61-R2 12 24 22 24 74 64.5 62.5 29 9.5 M1 H1 1/4 (E1, E1) A side L1, L1 B B side Inch Size M2 C Model A side B side B C E1 E1 E2 E2 H1 H2 L1 L1 L2 L2 M1 M2 Min

Compact 5-Port Solenoid Valve

C6 C8 Stations U side D side L1 (L5) DIN rail holding screw (For DIN rail mounting) Manual override (Non-locking) 4(A) port side: Blue 2(B) port side: Yellow 63 21 18 (Light/surge voltage suppressor) Input block (DIN rail) SI unit (8) 4.6 (5.5) A B A B A B A B 97.9 A 4 A 4 A 4 A 4 83 9.9 0 1 8 66 65.5 2 (46.2) 3 B 2 B 2 B 2 B 2 (35) 2 2.2 (14.8) (14.9) 4 x M4 Mounting hole (Recommended tightening

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

Table of Contents

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

Table of Contents

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

F

17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Table of Contents

19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

[126.4] 107.4[111.8] R P R A B A B A B A B A B 30 R P R 61.5 (DIN: 62.8) 62.3 (DIN: 63.6) 21 21 83.7[85.9] 84.5[86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in One-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5[65.5] + + + + + 43.1 26.5 (4.9) 63 L