Bearing Style: L (Ball Bush Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 10mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bearing Style: L (Ball Bush Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: MAPC (1.0m Cord Length, M8-3 Pin Connector)

Bearing Style: L (Ball Bush Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 10mm, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Specification: Copper, Fluorine & Silicon-free+Low Particle Generation, Vacuum Suction Type, Bearing: Ball Bushing Bearing, Bore Size: 6mm, Stroke: 10mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

32.5 44.5 6 CJ2 16 12.5 21 33 45 51 75 93 105 6.5 6 12 12 21 25 39 5.5 CM2 D-M9lV 10 13 13 20.5 32.5 44.5 6 16 12.5 12.5 21 33 45 51 75 93 105 6.5 CG1 6 8 17 21 35 1.5 Band mounting D-A9l 10 9 16.5 28.5 40.5 2 MB 16 8.5 17 29 41 47 71 89 101 2.5 6 8 8 17 21 35 1.5 CA2 D-A9lV 10 9 9 16.5 28.5 40.5 2 CQ2 CQS 16 8.5 8.5 17 29 41 47 71 89 101 2.5 6 7.5 16.5 20.5 34.5 1 D-H7l/H7C D-H7lW/

CATALOG

20 30 50 75 100 Cp1 Cp2 Cy1 Cy2 Cr1 Cr2 MXF8 0.56 0.78 0.98 *6 10 *6 21 21 10 MXF12 1.65 2.22 3.34 10 11 10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

Table of Contents

17 10 10 10 10 52.6 8 15.2 18.5 21 Dimensions: KM16 applicable tubing 2-4.5 mounting hole Applicable tubing Applicable tubing O.D.

2

(mm) Weight (g) Nylon Urethane 4 1/8 KQ2K04-U01l 10 8.2 10 14.4 12.9 20.8 13.3 3.4 3.4 4.5 4.7 1/4 KQ2K04-U02l 14 8.2 10 14.4 14.7 21 13.3 3.4 3.4 4.5 11.3 Applicable tubing 6 1/8 KQ2K06-U01l 10 10.4 10 14.7 15 23.8 13.3 8.7 6.9 4.5 5.1 1/4 KQ2K06-U02l 14 10.4 10 14.7 16.8 24 13.3 8.7 6.9 4.5 11.7 3/8 KQ2K06-U03l 17 10.4 10 14.7 17.9 25.1 13.3 8.7 6.9 4.5 21.2 D1 L1 M 8 1/8 KQ2K08-U01l 10

Fluoropolymer Piping Equipment

LQ1T31-R4 10 3 10 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T31-R7 8 8 10 5.5 LQ1T31-R8 6 6 10 3.6 LQ1T32-R5 6 8 8 3.6 LQ1T32-R6 6 10 10 3.6 LQ1T32-R7 6 6 8 3.6 LQ1T41-R2 12 8 12 5 20 20 20 9 18 17 17 17 36.5 36.5 36.5 23 23 23 5.5 LQ1T41-R3 12 6 12 15 14 33 16.5 3.6 LQ1T41-R5 10 12 12 24 21 43 28 7.4 LQ1T41-R7 10 10 12 7.4 LQ1T41-R11 6 10 12 7 20 20 29 14 28 17 20 17 38.5 23 6

Table of Contents

19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6

F

21 17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

KJ

17 10 10 10 10 52.6 8 15.2 18.5 21 Dimensions: KM16 applicable tubing 2-4.5 mounting hole Applicable tubing Applicable tubing O.D.

A

20 30 50 75 100 Cp1 Cp2 Cy1 Cy2 Cr1 Cr2 MXF8 0.56 0.78 0.98 *6 10 *6 21 21 10 MXF12 1.65 2.22 3.34 10 11 10 23 23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Air Fittings & Tubing

6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions for the use with One-touch fittings Caution Refer to Air Fittings & Tubing Precautions for the

Compact 5-Port Solenoid Valve

) p. 21 JJ5SY1-10PH JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Connector Entry Direction Adjustable (10 pins) p. 21 JJ5SY1-10PHC JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Compact Type (10 pins) p. 21 JJ5SY1-10S JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: EX250 Series p. 77

Air Slide Table

10 18 12 27 49 40 400 113 10 10 19 16 35 62 50 670 201 16 16 33 20 43 72 60 1,100 314 21 21 49 25 52 88 70 1,900 491 41 41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Adaptor plate O-ring Manifold gasket 15 15 15 R2 R2 Individual exhaust spacer Individual exhaust spacer Applicable base 10-SS5YJ7-20 10-SS5YJ7-21 Applicable base 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42 R R R1 R1 Manifold gasket Manifold gasket Blanking plate assembly SYJ7000-21-1A Applicable base 10-SS5YJ7-20 10-SS5YJ7-21 Applicable base 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42 Round