CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, Same side CLQ 15 90 100 110 35 75 80 90 100 1 Different sides MLGP 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ7000-16-2A SYJ7000-21-1 Gasket Base mounted ARBYJ5000-00-P Pillips head screw M3 X 47, matted nickel plated (With spring washer) DXT199-21-6 SYJ7000-21-3A Pillips head screw M3 X 55, matted nickel plated (With spring washer) Pillips head screw M3 X 8, matted nickel plated (With spring washer) Blank plate Base mounted SYJ7000-21-1 Gasket DXT199-21-6 Individual exhaust interface SYJ7000-

MXQ

MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-

SYJ300/500/700

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Tamper Proof and Flat Head Screw

-11SD 12.8 17 17.9 31.8 43.3 21 3/8" 27.8 39.3 6 AS321F-03-08SD AS321F-N03-07SD 15.2 18.5 29.5 41 1/4" 13.2 27.8 39.3 17 8 R 3/8 19 23 9.8 53.7 1.2 47.7 20.9 AS321F-03-10SD AS321F-N03-09SD 18.5 21 31.8 43.3 NPT3/8 19 23 9.8 20.9 53.7 1.2 47.7 5/16" 15.2 29.5 41 18.5 10 AS321F-03-12SD AS321F-N03-11SD 20.9 22 32.8 44.3 17.9 31.8 43.3 21 3/8" 12 AS421F-04-10SD AS421F-N04-11SD 18.5 21 33.6 47.9

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

Air Cylinder

100 79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 L1 U1 A1 CM3 A (mm) CG1 CG1 Part no.

CM2

75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 1 to 50 63 67 67 71.5 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 109.5 201 to 300 126 130 130 134.5 301 to 400 151 155 155 159.5 401 to 500 176 180 180 184.5 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256

CG5-S

1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 IY-G10SUS Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE (mm) (mm) Part no.

MG

40 50, 63 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load weight m (kg) 80 20 20 10 10 5 20 50 100 200 5 20 50 100 200 Stroke (mm) Stroke (mm) 8-19-33 Series MGP Horizontal Mounting (Ball bushing bearing) (21) l = 50 mm, V = 400 m/s (22) l = 100 mm, V = 400 m/s MGPL16

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

Table of Contents

Refer to pages starting with 140 for mounting. 18 T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire LC1-1B1H1100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230

CJ5-S

14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot

CJ5-S

14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot

MY1

100) (80 and 100) (80 and 100) Black zinc chromated Seal list No.

CG5-S

1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

0.5

NT B1 21 Model Model 21 For IZF21 31 For IZF31 21 For IZF21 31 For IZF31 : 4 retaining bolts are included.

F

1/2 KQT10-04S 22 18.5 17 26.5 36 37 21 40.8 29.0 66 12 1/8 KQT12-02S 17 20.9 17 28.5 31 35.5 22 57.2 45.2 31 12 3/8 KQT12-03S 17 20.9 17 28.5 33 37 22 57.2 45.2 41 12 1/2 KQT12-04S 22 20.9 17 28.5 37 39.5 22 57.2 45.2 68 16 3/8 KQT16-03S 22 26.5 21 33 38 44.5 24 71 (71) 112 16 1/2 KQT16-04S 22 26.5 21 33 41 46 24 100 (100) 116 Reference dimensions after PT thread installation.