1)MXQ12 (L)MXQ-AS12 (L)59.5291/41123.5124M8 x 1M4 x 1218.510.512.7M4 x 12

1)MXQ12 (L)MXQ-CS12 (L)59.5291/41122124M8 x 1M4 x 1220.5111318.5M4 x 12

1)MXQ12 (L)MXQ-AS12 (L)-X12259.5291/41143.5124M8 x 1M4 x 1218.510.512.7M4 x 12

1)MXQ12 (L)MXQ-CS12 (L)59.5291/41122124M8 x 1M4 x 1220.5111318.5M4 x 12

1)MXQ12 (L)MXQ-CS12 (L)59.5291/41122124M8 x 1M4 x 1220.5111318.5M4 x 12

03-ckqg_ckqp-e

CKQG-25A CKQG-R200S CKQG-30A 183

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

JXCx-OMU0004

200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9

High Purity Fluoropolymer

3/8" 6 30 21 33.1 28 11 22 30 (M) N 28.5 1/2" 10 19 12 19 35 1/2" LQ2R52-M H 7 42.5 46 40 32 14 28 36 LQ2R54-M LQ2R53-M Class 4, 5 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

PF-OMM0004_C

ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSFKMCPVC 25A 30 A 285 g 340 g 370 g 425 g 171 3mPas(3 cP)70 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 590 690 -69No.PF-OMM0004-D PVC ammonium hydroxide

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

Compact 5-Port Solenoid Valve

Centralized wiring and piping directions Specifications Max. number of outputs: 32 (Valve + Ejector) Valve stations: 2 to 24 stations (Max. number of outputs: 30, Depends on whether single or double) Ejector stations: 1 to 8 stations (Max. number of outputs: 16) Wiring and piping for valves and ejectors can be arranged in the same direction.

Cylinder

CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.

VP4

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

3 Port Air Operated Valve Series SYJA300 1

Not required Unrestricted 150/30 Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation. Note 2) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.