Vacuum Pad: Ball Joint Type Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry
H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.
3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !
P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5
Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow
Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve
Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment
<> <> ON(SVON ON) Unable to find motor phase in set time. (1-193) E <> ON SVON ON <> Output current limit exceeded E <> set value (1-194) <> Current sensor abnormality has occurred. (1-195) E <> <> Position error overflowed (1-196) E <> <> EEPROM Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm
Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36
Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Operation Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -
Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Operation Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -
D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.
mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 0.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 ABS 100 50.00 3000 3000
Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -
ON(SVON ON) (1-193) E <> ONSVON ON <> (1-194) E <> <> (1-195) E <> <> 1-196 E <> <> EEPROM (1-197) E <> EEPROM 10 <> CPU CPU CPU (1-198) E <> 48 No.SFOD-OMT0011CN-A Revision history No.
Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.
Material Bronze Note Clear coated q Description Cover assembly Body Aluminum alloy Brass Platinum silver painted PTFE, EPR, FKM w e Plate assembly Valve element Piston assembly Return spring Second plate assembly r Brass, PTFE t Aluminum alloy y Piano wire u Aluminum alloy Body option S is made of stainless steel. 17-4-42
Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,