VCL

292 327 362 L3 94 129 164 199 234 269 304 339 374 L1 78 117 156 195 234 273 312 351 390 VV2CL3 L2 90 129 168 207 246 285 324 363 402 L3 102 141 180 219 258 297 336 375 414 L1 84 126 168 210 252 294 336 378 420 VV2CL4 L2 96 138 180 222 264 306 348 390 432 L3 108 150 192 234 276 318 360 402 444 Manifold composition Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

: Nut material PVDF dimensions H1 H3 (E3,E3) (E1,E1) L3,L3 L1,L1 G D Metric Size MS Model B B side (Center) A side (Left) C side (Right) E1 E1 E2 E2 E3 E3 F G H1 H2 H3 L1 L1 L2 L2 L3 L3 M1 M2 M3 Applicable tubing O.D.

ZP

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 BC ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 63 Series ZP2V Vacuum Saving Valve Dimensions Vacuum generator side Vacuum generator side M2 M2 H1 H1 Vacuum generator side L2 L1 L3 L2 M2 H1 L2 L33 (L4) (L4) No.0.8 No.0.8 L1 L3 L2 L3

ZP

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 BC ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 63 Series ZP2V Vacuum Saving Valve Dimensions Vacuum generator side Vacuum generator side M2 M2 H1 H1 Vacuum generator side L2 L1 L3 L2 M2 H1 L2 L33 (L4) (L4) No.0.8 No.0.8 L1 L3 L2 L3

Electric Slide Tables

[mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load

ZP

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 BC ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 63 Series ZP2V Vacuum Saving Valve Dimensions Vacuum generator side Vacuum generator side M2 M2 H1 H1 Vacuum generator side L2 L1 L3 L2 M2 H1 L2 L33 (L4) (L4) No.0.8 No.0.8 L1 L3 L2 L3

VZ100/300/500

M5 L3 47 63 79 95 111 127 143 159 175 191 207 223 239 255 271 287 303 319 335 L1 L2 Rc 1/8 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 L3 48 65 82 99 116 133 150 167 184 201 218 235 252 269 286 303 320 337 354 L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length

Rotary Actuator/Vane Type

L1 = E2 = E4 = L3 = X = [mm] Size CRB2, CRBU2 Y L1 max L4 D2 10 4 to 8 Y-2.5 L2 + 1.5 3 15 4.5 to 9 Y-3 L2 + 1.5 3 to 4 20 5 to 10 Y-3.5 L2 + 2 3 to 5 30 7 to 13 Y-5 L2 + 3 3 to 6 [mm] Size CRB2 CRBU2 X L1 max L3 D1 X L1 max L3 D1 10 6 to 14 X-4.5 L1 + 1.5 3 4 to 14 X-2.5 L1 + 1.5 3 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 4.5 to 18 X-3 L1 + 1.5 3 to 4 20 8 to 20 X-6.5 L1 + 2 3 to 5 5 to 20 X-3.5

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L3 L1 L2 L3 Port size M5 Rc (PT)1/8 One-touch fitting 2.2-32 3 Port Pilot Solenoid Valve Rubber Seal Series SYJ700 Model Weight (g) (1) SY Valve model Actuation Port size Effective area (mm2)(Cv) Grommet L plug connector, M plug connector.

Single Axis Electric Actuator Series LJ1H

(mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

Integrated Controller

[mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10

VFS

(MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194 1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5 3-8-48 49 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS2000 Manifold Specifications Dripproof Manifold (Equivalent to IP65) VV5FS2-01WTBU D VV5FS2-01W Common terminal box Attachment plug lead wire VFS200

Electric Actuator/Slider Type

L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

KF

area (mm2) Weight (g) L4 A Model L1 L2 L3 M d thread R I.D.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

SZ3000

L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 12 273 262.5 239.5 17 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4