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El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: Rc, Bracket: w/Foot Bracket, 2-position, Single Only

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

RB/RBL/RBQ

F F1 628 < 686 (max.) CEP1 3. Specifications and operational instructions Ensure that the collision speed, thrust, operation cycle, the ambient temperature and atmosphere fall within the specifications. Be aware of the min. installation radius in the case of rotating impacts.

Electro-Pneumatic Proportional Valve Series VEF/VEP

AP100 P F P F 887 Series VEF/VEP Flow type: VEF Diagram of Working Principle Flow Characteristics: 3 Port The spool controls the sleeves opening through the balance between the proportional solenoids pulling force (F1) and the springs reaction force (F2).

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

to Order Manifold Base VV5FS3-31 VV5FS3 31 1 05 03 Part no. for mounting bolt and gasket BG-VFS3030 Thread type Series VFS3000 Manifold Nil N Rc NPT NPTF G T F Option Exploded View of Manifold P, EA, EB port size 03 3 8 Rc Manifold block assembly VVFS3000-1A-30 Symbol Stations Passage Porting specifications 3(R2), 5(R1) 1(P) 2(B), 4(A) 02 2 stations Hexagon socket head cap screw: M4 x 53

RB/RBL/RBQ

F F1 628 < 686 (max.) CEP1 3. Specifications and operational instructions Ensure that the collision speed, thrust, operation cycle, the ambient temperature and atmosphere fall within the specifications. Be aware of the min. installation radius in the case of rotating impacts.

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: C4 (ø4 One-touch Fitting, Metric)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: -

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø4 One-touch Fitting, Metric, Thread Type: -, Bracket: -

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø1/4" One-touch Fitting, Inch, Thread Type: -, Bracket: -

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Applicable tubing O.D. 3.2 Applicable tubing O.D. 4 Applicable tubing O.D. 6 M5 female thread Straight VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Elbow VVQ1000-F1-LC3 VVQ1000-F1-LC4 08 8 stations Note) 2 pcs. are included in one set. 26 Series ZQ Specific Product Precautions Be sure to read before handling.