Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: Rc, Bracket: w/Foot Bracket, 2-position, Single Only

Rotary Actuator/Vane Type

(Viewed from the short shaft side) Symbol: C6 Symbol: C5 Applicable to single vane type only. Start of rotation is 45 up from the bottom of the vertical line to the left side. Applicable to single vane type only. Start of rotation is horizontal line (90 down from the top to the left side).

Model Selection 1

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

Ejector Valve Unit, Series ZYY/ZYX

For ejector valves only (without solenoid valves) Ejector valve ZYY35LZ-10S-E15C Double solenoid (24VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Ejector mounting position U D U side D side U side Stations

MY1

D-Y7P, D-Y7PV D-Y59B, D-Y69B D-Y59A, D-Y69A Internal circuits Lead wire length 0.5m 10 9 10 D-Y59A, D-Y69A Lead wire length 3m 53 50 53 Dimensions DC(+) Brown [Red] D-Y59A, D-Y7P, D-Y59B Main circuit of switch OUT Black [White] M2.5 x 4 Slotted set screw Indicator light 3.4 2.5 DC() Blue [Black] SMC 6.2 5 D-Y7P(V) 29 DC(+) Brown [Red] Main circuit of switch Most sensitive position 12.5 OUT

IZx-OMT0049

Note 53) Press S button once Press S button once [Channel selection mode] Note 53) In Channel selection mode, frequency set mode, or offset voltage adjustment mode, the selected bar (high voltage power supply module) moves on to the ion generation stop mode by pressing and button simultaneously for 2 s or longer and stops the ion generation.

0.4

2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

Table of Contents

C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

VZ5000

2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50

VZ3000

connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

Manifold Specifications

-41 VV5Z3-42-01 VV5Z3-42-C6 VV5Z3-43 0.16 0.17 0.21 0.20 0.19 0.26 0.23 0.31 0.29 0.32 0.64 0.68 0.82 0.80 0.74 0.15 0.16 0.18 0.17 0.14 0.35 0.35 0.22 0.24 0.29 0.55 0.59 0.74 0.71 0.55 1/8 1/8 1/4 1/4 1/8 M5 x 0.8 M5 x 0.8 1/8 C6 C4 VZS VZ34 VFS Note) Value at manifold base mounted, 2 position single operating VS4 How to Order Manifold VQ7 Instruct by specifying the valves and blanking

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel key is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.

VQ20/30

VN VQ30 LVC LVA JIS Symbol LVH (A) 2 Characteristic Specifications LVD VQ20 VQ30 Series LVQ 1 (P) C8 C6 C10 C12 N.C.

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

VZ5000

connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-58 5 Port Solenoid Valve Body Ported

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side/Base (Same side of solenoid) Piping direction/ Location Port size P, E port VT Top/Valve Side/Base (Opposite side of solenoid) VV3Z2-50-0612(A) port M5 x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200

Digital Flow Switch (Integrated display type)

PF2M701 (1 L/min) PF2M702 (2 L/min) PF2M705 (5 L/min) PF2M710 (10 L/min) -97No.PF-OMW0007-E PF2M725 (25 L/min) PF2M750 (50 L/min) PF2M711 (100 L/min) PF2M721 (200 L/min) -98No.PF-OMW0007-E Dimensions PF2M7#-C4/C6/C8/N7(-L) (mm) Model A P PF2M701/702/705/710-C4(-L) 59.1 2.8 depth 8.4 PF2M701/702/705/710/725/750-C6(-L) 59.9 2.8 depth 8.4 PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(