High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

F

-2 TFU 0805B-3 Number of Tubes 2 3 2 3 2 3 TFU B Tube OD (mm) 4 6 8 Tube ID (mm) 2.5 4 5 OD/ID Flow Factor Cv/Metersote 3) 0.11 0.39 0.70 04254mm OD 2.5mm ID 06046mm OD 4mm ID 08058mm OD 5mm ID Max Operating Pressure 0.8MPaNote 2) / 120PSI Operating Temperature -20~+60C / 4~140F N U M B E R O F T U B E S Material Polyurethane 2 2 3 3 Color Black Note 1)Min Bending Radius (mm) 10 15 20 Tube

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Refer to page 302 for acceleration time. 281 Series LXS High Rigidity Slide Table Type CE Marking With Motor Brake/Without Motor Brake How to Order LX S H 2 S 1 S B 100 F9N Q B CE marking Slide table type Actuator configuration S Number of auto switches Direct acting guide Guide type 1 pc. 2 pcs. 1 2 H 6 pcs. 6 Motor type CE marking 2 5 2 phase stepper motor 5 phase stepper motor Contact

ZP

) Width across flat 10 (Hexagon) P Q Q P 5 5 S S 31 8 31 (39) (39) 14.9 14.9 R R 6 6 M5 x 0.8 M5 x 0.8 8 Y Y C A A a a C b B 20 21 Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y Model ZP2-R3507W--B5 ZP2-R4010W--B5 ZP2-R5010W--B5 ZP2-R6010W--B5 ZP2-R4020W--B5 ZP2-R5020W--B5 ZP2-R6020W--B5 ZP2-R8020W--B5 2 x 1.5 0.5 0.5 10 11 2.5

REA/REB

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) B: Maximum speed Load weight chart > 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Weight Product no. Weight [g] Note LE-CP-1-B-S 240 Standard cable LE-CP-3-B-S 380 LE-CP-5-B-S 630 LE-CP-1-B 190 Cable color Connector D terminal no.

5 Port Solenoid Valve

screw 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 19 3 1 69 55.5 55.5 53.7 12 X 51 4 A 4 A 4 A 4 A 4 A 4 A 4 A 34 33.5 22 17 15.5 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 1/8" External pilot port 68.5 Note) The dimensions of the bottom ported type are common to all S kits.

CA2

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

0.4

C10 [3(R) EXH port] C10 [3(R) EXH port] (C12 in case of branch type) VFR C10: 10 One-touch fitting (C12: 12 One-touch fitting) 4 x M8 3-pin socket 2 x M12 VQ7 DIN rail clamp screw R R 0 76.5 BUS 3 3 X 1 X 1 60 49.5 B B B B B B B B 12 12 2 P P PWR 30 3 25 1 10 (12) 1 A A A A A A A A 13.5 25 M3 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4

Vacuum Pad

6 7 7 Width across flat 10 Width across flat 10 2 2 D 2 2 D M5 x 0.8 2 M5 x 0.8 M8 x 0.75 M8 x 0.75 10 22 A B 10 22 A B Square 8 Square 8 4 4 15 15 1.8 1.8 8.4 13 2 10 6 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) 11 Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

0.4

None (Non-polar) Nil E Note1, 2) 2(B) 4(A) 2(B) (A)4 Metal Rubber B Note) VQ 4/5 Note 1) Not applicable to the S kit.

2 Phase Stepper Motor/Without Motor Brake Series LXP

For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 200 50 10 1 50 2.1 4.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 2.1 0.6 0.2 0.1 200 0.6 1.1 0.3 0.1 0.1 Refer to page 302 for acceleration time. 249 Series LXP CE Marking Guide Rod Type With Motor Brake/Without Motor Brake How to Order LX P B 2 S 1 S B 100 F9N Q B CE marking Guide rod type P Actuator configuration Number

42

10.7 129.5 Note 2) SI Unit 47 106 94.7 For U side mounting (S) For D side mounting (SD) 9 9 71.7 27 36.1 X 12 X 12 n B A 8 2 4 B A 7 2 4 Manual override B A 6 4 2 1/4" Note 3) B A A B 5 SMC SMC SMC SMC SMC B A 2 4 L2 L1 B A A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 2 4 B A A D side 1 A 4 2 50.5 Stations 38 27 1/8" External pilot port 11.7 139.9 (Single) 16.2 148.9

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

LEC-OM07605CN

LE-CSNS [:mm] E D A C Logo 39.0 23.8 12.7 B A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 AWG 24, 26, 28, 30 9 5 10. 10 .2 10.1 .2 10.2 .4 10.3 .5 10.3.1 .5 10.3.2 .6 10.4 .7 10.5 .7 10 1 10. 10 10.1 10.1[AL. 50 1] [AL. 51 2] 70% (120%(full load current)) LE-TT5 T6 a T7 T8 T9 b 10 2 10. 1000 1000 100 100 [s] [s] 10 10 1 1 0.1 0.1 100 20 0 100 200 300

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.