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80 100 No. of auto switches mounted Type Auto switch model Auto switch model 32 40 50 63 80 100 2 (Different sides, Same side) D-Z7/Z80 Reed switch 15 25 10 10 11 11 12 D-Z7/Z80 10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL

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10 1 D-Y59/Y69 2 (Different sides, Same side) D-Y59/Y69/ D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 6 D-Y7BAL 5 5 5 5 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

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Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

ITV

Approx. 172 Applicable products and accessories Applicable model ITV ITV20 ITV30 q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) AF30 AF40 IC AFM30 AFM40 B310L B410L VBA Y30 Y40 234 Y30L Y40L VE qAF40 wAFM40 VY1 G Accessory (Option)/Part No. PPA AL Flat bracket Dimensions Part no.

CHKD/CHKG

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 32 to 100 20, 25 B B D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-Y5 D-Y7 D-Y7W D-Y7BA D-Z7 D-Z80 A B MA B MA A D-M9V D-M9WV D-M9AV D-Y6 D-Y7V D-Y7WV D-A9V D-M9V D-M9WV D-M9AV D-A9V A A Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA

MU

switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A 4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (

MU

Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

MU

CU Minimum Stroke for Auto Switch Mounting (mm) D-A7lH, A80H D-F7lW, J79W D-A79W D-F7l, J79 D-F7BA, F7NT D-F7lF CQS D-A7l D-A80 D-A73C D-A80C Number of auto switches D-F7lV D-J79C D-F7lWV CQ2 MU 2 pcs. 5 10 15 15 1 pc. 5 5 10 15 Construction Component Parts No.

Low Profile Guide Type

(mm) D-M9V D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A90V D-A96V D-A93V Bore size (mm) D-A90 D-A96 D-A93 D-M9 D-M9W Bore size (mm) Mounting pattern q, w Mounting pattern e 32 32 20 22 35 20 10 15 25 12 5 10 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)