ZP

4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W

KJ

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

Vacuum Pad

x 0.8 6 18 A B 6 18 A B 4 4 11 11 1.8 6 4.5 4 1.8 1.2 0.8 6.5 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) Non-rotating (J) Rotating (K) A B D A B D Model Model Rotating (K) Non-rotating (J) ZP3-Y04UM:3-B5 ZP3-Y04UM:6-B5 ZP3-Y04UM:10-B5 ZP3-Y06UM:3-B5 ZP3-Y06UM:6-B5 ZP3-Y06UM:10-B5 12.2 13.4 15.4 12.2 13.4 15.4 22.5 25 29 40 46 56 11 14.5 20.5 12.8 14.2 16.6 22.5

AC

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator ARM2500-A-02 ARM2500-A-02 ARM3000-A-02 ARM3000-A-02 Regulator 1 o !0 !1 !2 Replacement Parts End plate R 1 Description Material Part No. End plate L 1 No.

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-02 VM1000-4N-02 T0425 TU0425, T0403,TS0425 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

VFS

02 2 stations 6 For bottom ported, Rc 1/8 is only available.

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

V

2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-03 2.2 0.19 3.4 1 1 VX3324-03 2.2 0.19 3.4 3/8 (10A) 0.3 VX3234-03 3 0.33 6 0.6 VX3334-03 3 0.33 6 0.15 VX3244-03 4

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If valves other than the non-polar type are used, this may cause malfunction. 8 0 1 9 10 2 B B B B B 11 3 12 4 D side U side 13 5 A A A A A 14 6 15 7 + + + + + SoL. A SoL.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

6 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

CG5-S

A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

Series SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch

2/3 Port Valve

3.4 0.19 1 4 Water Air Oil: 2.0 Steam: 1.0 0 2 4 VX313 -02 0.24 4.3 (8A) 3 VX3234-02 VX3334-02 VX3244-02 VX3344-02 VX3224-03 VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.

Table of Contents

Model A B C D Y Y A B C D Flat Model ZPT10D-6-A10 10 12 15 24 6 Flat with ribs U C ZPT13 -6-A10 U C ZPT16 -6-A10 U C ZPT16D-6-A10 ZPT10 -6-A10 16 18 16 25 7 10 12 15 12 21 1.7 1.8 3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 10 16 G Model Dimensions by Stroke E F E F 10, 13 16 ZPTD10-6-A10 35.5 73.5 23 36.5 74.5 G Model E F E F ZPTD20-6-A10 45.5 111.5 46.5 112.5 51 U C ZPT 20-6-A10 U

SV

A, B port size (metric) A, B port size (inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch