SY

Caution Mounting screw tightening torques d M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm D A L Dimensions Applicable fitting size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 89 Type 41 42 Type 41P 42P Manifold spec. sheets Order made Type 45 Type 45Single valve A NA Features Precautions Type43 Type43P Manifold Options Single valve Type

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

Table of Contents

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

Hydraulic

Auto switch type Bore size (mm) Bore size (mm) Standard strokes (mm) Model D-A3, D-A4 D-G3, D-K3 D-B5, D-B6 D-G5, D-K5 D-A5, D-A6 D-F5, D-J5 32 25 to 800 32 BT-06 BA-32 40 25 to 800 40 BT-06 BA-04 BD1-04M 50 25 to 800 50 BT-06 BA-05 BD1-05M CH2E 63 25 to 800 63 BT-08 BA-06 BD1-06M 80 25 to 1000 80 BT-16 BA-08 BD1-08M 100 25 to 1000 100 BT-18 BA-10 BD1-10M 32 BT-06 BAF-32 Note) Refer to

ZP

D. Applicable tube O. D.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

reduces flow setting time

L5 A AS-FE D2 KE AS-FG AS-FP L2 L1 T H (Width across flats) AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-23 3.2 ASP 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 ASN

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

V100

) (D, Y) VS N.C.

Modular Type Air Filter Series AF

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 30 AFM20/30/40 Dimensions Bracket (option) AFM20 L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30, 40, 40-06 Bracket (option) A D G F K M J C B E H OUT IN OUT Port size Min. clearance for maintenance AFM30: 50 AFM40: 75 P Drain AFM20 AFM30, AFM40, AFM40

F

Applicable Applicable Model D L A M Minimum Tube OD Fitting Size d Hole Applicable Applicable Model D L A M Effective Tube OD Fitting Size d Orifice (mm 2) Inch Diameter mm Nylon/Urethane 1/8 9(5/32) KQR01-03 10 37 21 15.5 2.5 3.2 4 KQR23-04 9.2 34 17.5 15.5 3.4/2.9 1/8 4.8(3/16) KQR01-05 10 37.5 21 15.5 2.5 4 6 KQR04-06 10.4 34.5 17.5 16 5.6/5.6 5/32 4.8(3/16) KQR03-05 11 38 21.5 16 3 4

Modular Type Filter Regulator Series AW

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option Note 3) Symbol Nil B C D H Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) AW20(K) to 40(K) Description With bracket Float type auto drain (N.C.) Float type auto drain (N.O.)

2/3 Port Valve

Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

width across flats) AS-D AS-T ASP ASN AQ ASV AK Metric Size Inch Size VCHC Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Series VQ Base Mounted Metal Seal/Rubber Seal

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P SY SYJ SX VK VZ VF VFR VP7 How to Order Manifold How to Order Manifold 06 F SA D VV5Q12 06 VV5Q12 P SC D VP4 VQ Option Option VQ4 Number of stations Stations VQZ How to order D-sub connector, 15 pin Connector location Side(horizontal) Without cable How to order Flat cable, 20 pin Connector location Side (horizontal

Table of Contents

D-C73/D-C76/D-C80 Band Mounting Style. D-B53/D-B54/D-B64 Band Mounting Style . D-C73C/D-C80C Band Mounting Style. D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. D-E73A/D-E76A/D-E80A Direct Mounting Style. 2-color Indication Type .

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.