VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

Compact and Lightweight

ZH10DSA 4 products are clamped with L bracket. qZH10DSA-06-06-08N 4 pcs. wAS-10L 2 pcs. eZH2-TB104-A 1 set (2 pcs. included) The products are not assembled.

Flow Control Equipment

Valve Check Valve Series AK Series AQ Model Port size Page Model Port size Page Lip AQ1500 AQ1510 AK2000 AK4000 AK6000 AQ2000 AQ3000 AQ5000 / 1 8 M5 / 1 8, / 1 4 4.5-1 / 1 4, / 3 8, / 1 2 / 3 4, 1 4.3-1 / 1 8, / 1 4 Diaphram / 1 4, / 3 8 / 1 2, / 3 4 Model Applicable tube Page Built-in One-touch Fittings AQ240F-04 AQ240F-06 AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

V

P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !

VFS

the bottom of terminal block. 01T VV5FS5 1 06 04 Thread type VK Series VFS5000 Manifold Stations Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 04 06 A, B P, R1, R2 VZ Plug-in type with terminal block T 1 2 Rc Rc Rc M Mixed F 10 stations 10 3 4 3 4 VF Option Symbol For bottom ported, Rc is only available. 1 2 VFR Porting specifications (A, B) Passage Symbol R1, R2 P VP4 1 Side 2 Courtesy

reduces flow setting time

Example) AS2201FS-G01-06 Control type Note) 0 Meter-out 1 Meter-in Applicable tubing O.D. Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Note) Meter-out and meter-in types can be visually identified by color of the knob.

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 With bracket M4 Nut 5 14.5 2 x 4.6 15 5.8 26.5 M4 x 20 1 46.4 1 Mounting bracket for single unit (Option), [Nuts and bolts are included.]

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

CG5-S

AS4211FG-04-10 AS3211FG-02-12 -03-12 AS4211FG-04-12 AS1311FG-M5-23 AS2311FG-01-23 AS1311FG-M5-04 AS2311FG-01-04 -02-04 AS1311FG-M5-06 AS2311FG-01-06 -02-06 AS3311FG-02-06 -03-06 AS2311FG-01-08 -02-08 AS3311FG-02-08 -03-08 3.2 4 6 R 1/4 R 3/8 R 1/8 8 R 1/4 R 3/8 R 1/8 AS2301FG-02-10 AS3301FG-02-10 -03-10 AS4301FG-04-10 AS3301FG-02-12 -03-12 AS4301FG-04-12 AS2311FG-02-10 AS3311FG-02-10 -03-

A

0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !

Pulse Valve

type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (40A) R Rc N NPT F G *1 Seals and washers are included. r Fluid and ambient temperatures t With/without silencer B 40 to 60C Symbol Port size 06 10 14 Nil Without V V V S With V y Pilot port size * Port size: 14 only Select Nil for 06 and 10.

Series KC Self-seal Fittings

Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

SY

8 01 SY5000 6 One-touch fitting C6 8 One-touch fitting C8 SS5Y3-41P-06-C6 .1 set (Type 41P , 6 station manifold base part no.)

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (6A) 110g 1 8 Weight (Basic) Model Actuator part No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.