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This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13 sec. Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C, it is 2.8 x 10-8 sec, or about 200 times shorter. The objective of baking is to exhaust water with long adsorption residence time more quickly.

2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Material Note Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !8 Aluminum alloy Hard anodized Aluminum alloy Plate A External slider tube w !

2 rt ew u y !3!4 i o q !7 !6 !9 !8 @8 #2 #0 #1 #3 #4 Component Parts Material No. Description No. Description Material Note Note Stainless steel Nickel plated Carbon steel Lock nut B Cylinder tube q !8 Aluminum alloy Hard anodized Aluminum alloy Plate A External slider tube w !

Ionizer Emitter cartridge One-touch fitting End bracket Intermediate bracket Feedback sensor u 1 2 3 4 5 6 7 8 9 w IZS41/42 series i rt q e o Auto balance sensor [High accuracy type] Power supply cable (for IZS40) Power supply cable (for IZS41/42) w 425 IZS40/41/42 Series Accessories (for Individual Parts) Feedback sensor IZS31-DF Auto balance sensor [High accuracy type] IZS31-DG Power supply

(Not available for S/SQ kit) rt D-side end plate assembly no. y U-side end plate assembly no.

(M)/ :(26 ) -17No.EX-OMQ0015CN PROFINET PLCOFF PLC SF PLC EX600 BF PLCOFF PLCSI PLC SI PLC SI Device Name BF SI Node flashing test SF BUS IN No Link / No Activity BUS IN Link / No Activity () BUS IN Link / Activity BUS OUT No Link / No Activity BUS OUT Link / No Activity () BUS OUT Link / Activity :(26 ) -18No.EX-OMQ0015CN EX600-SPN1 EX600-SPN2 PROFINET IO(PROFINET RT

Input Specifications: 1 (Current Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: A1 (Bracket A, Vertical Mounting), Sensor Connector: F (Sensor Connector, for

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output]

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m)

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: A1 (Bracket A, Vertical Mounting), Sensor Connector: F (Sensor Connector, for

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: D (Panel Mount Adapter + Front Protection Cover)

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: D (Panel Mount Adapter + Front Protection Cover), Sensor Connector: C (Sensor

Input Specifications: 0 (Voltage Input), Output Specification: RT [2 Outputs (NPN/PNP Switching Type) + Analog Voltage Output], Unit Specification: Units selection Function; for Overseas use only; SI Unit provided for Use in Japan, Lead Wire: L (Power Supply/Output Connection Lead Wire, 2m), Bracket/Panel Mount: D (Panel Mount Adapter + Front Protection Cover), Sensor Connector: C (Sensor