End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MXS MXQ MXF -H -R -W MXW N L Centre trunnion: CBA1T Bore size Stroke MXP MG MGP MGQ (mm) MGG Symbol Foot Center trunnion Clevis Flange Stroke range Stroke range Stroke range ZZ Stroke range MGC FD LD LH LT LX RT X Y Z B FT FV FX FY FZ RT Z CD CZ L U Z ZZ TD TT TY TZ Z ZZ RY ZZ RR LS LY RY CX TX Bore (mm) Front Rear Front Rear 40 0.032 0.059 800 500 500 800 500 15 9.0 138 3.2 27 13 24 175

Air Cylinder Series CS1

across flats KA S + Stroke 4 x J With rod boot 2 x P MB MB1 C CA2 d 4 x LD CS1 LS + Stroke ZZ + Stroke ZZ1 + l + Stroke CS2 With auto switch: CDS1L ~ = Width across flats KA S + Stroke 4 x J 2 x P With rod boot ~ = ~ = C d 4 x LD LS + Stroke ZZ + Stroke ZZ1 + l + Stroke (mm) Stroke range* Type Bore size (mm) (mm) Long stroke range (mm) A AL B C D E EA F FA G J K KA LD LH LS LT LX LY MM N RT

IDX-OM-P023E

Note 3) Calculated at 1 RT = 4.535kW Note 4) If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. Note 5) The value shown in it is a reference value at rated condition and is not the guaranteed value.

IDX-OM-P026E

Note 3) Calculated at 1 RT = 3300 kcal/h Note 4) If the product is subjected to a short power outage (including voltage sag), it may take a long time to start operating normally or be unable to restart normally due to the protective equipment triggered after the power is recovered. Note 5) The value shown in it is a reference value at rated condition and is not the guaranteed value.

SMC Basic Pneumatics

. -4i -2 .44 -.4 5000 4m0 40 30 m 2500 2000 1500 12.5 1 0 ===-rt=='-t {E -.2-_L-2. d r / .zx. :2. 4 6 (mm) Fig.6.14 Theortical Force of pneumatic cylinders, trom 2.5 to 30 mm (left and top scales) and from 32 to 300 mm (right and bottom scales) for 19,.1-a"ng,5 bg!.

Profile Design ISO/VDMA Air Cylinder Series CP95

32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table) Therefore, side load is allowable Order No. 32 CS95-32 40 CS95-40 50 CS95-50 63 CS95-63 80 CS95-80 100 CS95-100 1.8-8 ISO/VDMA Air Cylinders Series CP95 Dimensions standard specifications [mm] CP95SB-stroke Stroke end cushioning STROKE STROKE CP95SB-stroke W STROKE STROKE STROKE Bore AM B D EE PL RT

High Vacuum Angle Valve, XL Series

From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm is C=11.6A l/sec, at an air temperature of 20C. Valve closing The time from the cut off of power to the actuation solenoid valve until 90% of the valve (XLm) return stroke has been completed is the valve closing response time.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

CL

Long stroke Bore size (mm) Stroke range (mm) 40 RT RY 50 to 100 501 to 800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600 30 40 45 50 36 36 40 76 92 112 136 164 184 204 50 63 80 100 125 140 160 125 to 160 Note) 125 to 160 with auto switch type is not available.

0.4

SZ VF rt D-side end plate assembly no. VVQ2000-3A-1 y U-side end plate assembly no.

•

.-..J'tII (mm) (mm) Provided as standard 2.5 4 Bellows type Bellows type 6 i4 (Barb fitting) '2:.5~~6= '=4= (B=a='b=f=;rt=i~=)~ Width across flats 10 Width across flats 6 "' ~~-~ M14Xl ~ -, " , Width aCfOSS flats 12 Width across flats 19 "i Width aCrOSS tlats 8 2.S o K J B L (mm) (mm) ;K ;L yo ;A Moilel ;8 '0 C iK n Model I ~I!'

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With rod boot MB MB1 CA2 CS1 LS + Stroke ZZ + Stroke ZZ1 + l + Stroke C76 With auto switch: CDS1L C85 ~ = S + Stroke Width across flats KA With rod boot C95 CP95 ~ = ~ = NCM NCA LS + Stroke ZZ + Stroke DZZ1 + l + Stroke -X Stroke range Type Bore size (mm) Long stroke range (mm) C A D J K LT LY MM N P AL E KA LX RT

CL

15 15 17 40 40 52 52 59 59 59 70 86 102 116 145 161 182 18 18 22 26 31 31 36 43 43 43 27 27 32 41 9.0 11.5 13.5 13.5 19 19 19 88 105 124 140 145 160 180 20 23 28 29 14 20 20 120 140 164 180 190 212 236 58 64 84 100 100 112 118 144 170 198 220 230 255 275 17 17 21 21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1 MM N RT

PROFINET Compatible Fieldbus System

Device ID: 0x000B FSU (Fast Start Up) MRP (Media Redundancy Protocol) Conformance Class C (RT/IRT) Web server (Applicable browser: Internet Explorer6 to 11, Firefox28.0 to 31.0, Google Chrome 36.0 to 37.0 Applicable OS: windows 8, windows 7) Applicable function -43No.EX-OMT0009 Branch port specifications Item Specifications Number of inputs and outputs 128 Inputs/128 Outputs Applicable system

EXxx-OMQ0015CN

(M)/ :(26 ) -17No.EX-OMQ0015CN PROFINET PLCOFF PLC SF PLC EX600 BF PLCOFF PLCSI PLC SI PLC SI Device Name BF SI Node flashing test SF BUS IN No Link / No Activity BUS IN Link / No Activity () BUS IN Link / Activity BUS OUT No Link / No Activity BUS OUT Link / No Activity () BUS OUT Link / Activity :(26 ) -18No.EX-OMQ0015CN EX600-SPN1 EX600-SPN2 PROFINET IO(PROFINET RT

HEC-OM-S019

Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

JXCx-OMY0004

Occupied area Input 36 byte / Output 36 byte Vendor ID 83hSMC Corporation Device ID 52h I/O data Record data MRP Device_Access Conformance Class C (RT/IRT) Applicable function -12No. JXC-OMY0004-A 3.2 Parts Description Details of the parts of the controller.

SI unit for PROFINET

common) / source Output type EX260-SPN2/-SPN4 NPN (positive common) / sink Solenoid valve connecting specification Connected load Solenoid valve with surge voltage suppressor of 24 VDC and 1.0 W or less (manufactured by SMC) Insulation type Photo coupler insulation type Residual voltage 0.4 VDC or less Network communication specifications Item Specifications Protocol PROFINET IO (PROFINET RT

EXxx-OMQ0016

. -18No.EX-OMQ0016 Specification Specifications Model EX600-SPN1 EX600-SPN2 Communication Protocol PROFINET IO(PROFINET RT) Communication speed 100 Mbps Configuration file GSDML file Occupied area (Number of inputs/outputs) (512 inputs/512 outputs) Max.

IDU/IDF

IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow